In the development of our Z-pinch plasma EUV source, xenon (Xe) is used for the
background gas discharges, and a solid tin (Sn) rod is used as target material due to its potential of
high convention efficiency (CE) from input electric energy to EUV radiation [1, 2]. The Z-pinch
plasma was driven by pulsed current with amplitude of 30 kA and pulse duration of 110 ns. Pinhole
imaging, EUV spectrograph and in-band EUV energy monitor were used to characterize the EUV
emission from the Z-pinch discharge. The experimental analyses have demonstrated the CE was as
high as 3% [3].