Analysis of the Silicon Carbide Boundary Layer under Passive and Active Oxidation

2019 ◽  
Author(s):  
Samuel Chen ◽  
Iain D. Boyd
Carbon ◽  
2014 ◽  
Vol 71 ◽  
pp. 102-119 ◽  
Author(s):  
Francesco Panerai ◽  
Bernd Helber ◽  
Olivier Chazot ◽  
Marianne Balat-Pichelin

2016 ◽  
Vol 36 (15) ◽  
pp. 3697-3707 ◽  
Author(s):  
David L. Poerschke ◽  
Mark D. Novak ◽  
Najeb Abdul-Jabbar ◽  
Stephan Krämer ◽  
Carlos G. Levi

2012 ◽  
Vol 29 (3) ◽  
pp. 193-198 ◽  
Author(s):  
Nathan S. Jacobson ◽  
Dwight L. Myers ◽  
Bryan J. Harder

1993 ◽  
Vol 76 (10) ◽  
pp. 2521-2524 ◽  
Author(s):  
Takayuki Narushima ◽  
Takashi Goto ◽  
Yoshio Yokoyama ◽  
Yasutaka Iguchi ◽  
Toshio Hirai

2014 ◽  
Vol 778-780 ◽  
pp. 553-556 ◽  
Author(s):  
Yasuto Hijikata ◽  
Yurie Akasaka ◽  
Shuhei Yagi ◽  
Hiroyuki Yaguchi

To verify the Si emission phenomenon during oxidation of SiC, the behavior of Si atoms was investigated using HfO2/SiC structures. At low oxygen pressure, i.e. the oxidation condition predominant to active oxidation, Si emission into oxide layer and the growth of SiO2 on the oxide surface were clearly observed by TOF-SIMS. On the other hand, the growth of SiO2 on the surface was suppressed under an ordinary pressure. These results evidence the Si emission during oxidation that is proposed in the Si and C emission model.


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