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2015 ◽  
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J.W. Yin ◽  
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Automatic pattern positioning of scanning electron beam exposure

1970 ◽  
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pp. 450-457 ◽  
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J.C. Russ
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Investigation of scanning electron beam parameters in terms of the disk-charged approximation for the sample potential

Optik ◽  
2016 ◽  
Vol 127 (17) ◽  
pp. 6978-6981 ◽  
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Musatfa M. Abid ◽  
Wasan J. Kadhem
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1987 ◽  
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pp. 901-905 ◽  
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scholarly journals Non-destructive imaging of buried electronic interfaces using a decelerated scanning electron beam

2016 ◽  
Vol 7 (1) ◽  
Author(s):  
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Yasuaki Yamamoto ◽  
Benedict A. Murphy ◽  
Andrew J. Vick
Keyword(s):  
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