Present experimental studies are aimed at analysis of hydrogen plasma stream parameters in various working regimes of QSPA-M operation. Temporal distributions of plasma electron density are reconstructed with optical emission spectroscopy. The magnetic field influence on plasma streams parameters is analyzed. It is shown that in regimes with additional magnetic field the plasma electron density increases by an order of magnitude in comparison with a density value without magnetic field. The plasma velocity and energy density parameters as well as their temporal behaviors were estimatedin different operating regimes of QSPA-M facility. Features of plasma visible radiation were analyzed. This information is important for QSPA-M applications in experiments on interaction of powerful plasma streams with material surfaces.
Real-time Virtual Metrology and Control of Plasma Electron Density in an Industrial Plasma Etch Chamber
