scholarly journals Measurement and ab initio Investigation of Structural, Electronic, Optical, and Mechanical Properties of Sputtered Aluminum Nitride Thin Films

2020 ◽  
Vol 8 ◽  
Author(s):  
A. M. Alsaad ◽  
Qais M. Al-Bataineh ◽  
I. A. Qattan ◽  
Ahmad A. Ahmad ◽  
A. Ababneh ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Aluminum Nitride ◽  
Ab Initio ◽  
Optical And Mechanical Properties

Electro-mechanical properties of multilayered aluminum nitride and platinum thin films at high temperatures

2019 ◽  
Vol 293 ◽  
pp. 128-135 ◽  
Author(s):  
P. Schmid ◽  
F. Triendl ◽  
C. Zarfl ◽  
S. Schwarz ◽  
W. Artner ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Aluminum Nitride ◽  
High Temperatures

Ion Beam Processing of Optical Materials

1988 ◽  
Vol 129 ◽  
Author(s):  
F. L. Williams ◽  
L. L. Boyer ◽  
W. Reicher ◽  
J. J. McNally ◽  
G. A. Al-Jumaily ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Packing Density ◽  
Optical Materials ◽  
Ion Beam ◽  
Film Material ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Optical And Mechanical Properties ◽  
Deposition Techniques

ABSTRACTWe have deposited thin films of optical materials using ion beam sputtering and ion assisted deposition techniques. It is possible to obtain good quality film material deposited on substrates at temperatures lower than normally required. Ion assisted deposition influences film stoichiometry and packing density, which in turn determine optical and mechanical properties of the film material. We discuss two general indicators which appear helpful in predicting the degree to which these occur.

Structural, optical and mechanical properties of amorphous and crystalline alumina thin films

2014 ◽  
Vol 568 ◽  
pp. 19-24 ◽  
Author(s):  
Priyanka Nayar ◽  
Atul Khanna ◽  
D. Kabiraj ◽  
S.R. Abhilash ◽  
Ben D. Beake ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Optical And Mechanical Properties ◽  
Crystalline Alumina

The Optical and Mechanical Properties of Toluene-TEOS Hybrid Plasma-Polymer Thin Films Deposited by PECVD

2009 ◽  
Vol 55 (5(1)) ◽  
pp. 1780-1784
Author(s):  
Sang-Jin Cho ◽  
In-Seob Bae ◽  
Jin-Hyo Boo ◽  
Sungwoo Lee ◽  
Donggeun Jung
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Polymer Thin Films ◽  
Plasma Polymer ◽  
Hybrid Plasma ◽  
Optical And Mechanical Properties
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