scholarly journals Dislocation Analysis in SiGe Heterostructures by Large-Angle Convergent Beam Electron Diffraction

Crystals ◽  
2019 ◽  
Vol 10 (1) ◽  
pp. 5
Author(s):  
Heiko Groiss
Keyword(s):  
Electron Microscopy ◽  
Electron Diffraction ◽  
Strain Relaxation ◽  
Large Angle ◽  
Convergent Beam Electron Diffraction ◽  
Self Organization ◽  
Detailed Knowledge ◽  
Beam Electron ◽  
Transmission Electron ◽  
Convergent Beam

Dislocations play a crucial role in self-organization and strain relaxation mechanisms in SiGe heterostructures. In most cases, they should be avoided, and different strategies exist to exploit their nucleation properties in order to manipulate their position. In either case, detailed knowledge about their exact Burgers vectors and possible dislocation reactions are necessary to optimize the fabrication processes and the properties of SiGe materials. In this review a brief overview of the dislocation mechanisms in the SiGe system is given. The method of choice for dislocation characterization is transmission electron microscopy. In particular, the article provides a detailed introduction into large-angle convergent-beam electron diffraction, and gives an overview of different application examples of this method on SiGe structures and related systems.

Characterization Of APB's In GaP

1996 ◽  
Vol 442 ◽  
Author(s):  
Dov Cohen ◽  
C. Barry Carter
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Electron Diffraction ◽  
Convergent Beam Electron Diffraction ◽  
Antiphase Boundaries ◽  
Beam Electron ◽  
Transmission Electron ◽  
Convergent Beam ◽  
Crystallographic Orientations

AbstractAntiphase boundaries in GaP crystals epitactically grown on Si (001) have been characterized using transmission electron microscopy. Convergent-beam electron diffraction was used to identify the antiphase-related grains. The antiphase boundaries were observed to adopt facets parallel to specific crystallographic orientations. Furthermore, stacking-fault-like contrast was observed along the interface suggesting that the domains may be offset from one another by a rigid-body lattice translation.

The Art and Application of Large Angle Convergent Beam Electron Diffraction

2012 ◽  
Vol 186 ◽  
pp. 16-19 ◽  
Author(s):  
Elżbieta Jezierska
Keyword(s):  
Electron Diffraction ◽  
Large Angle ◽  
Antiphase Boundary ◽  
Antiphase Domain ◽  
Dark Field ◽  
Convergent Beam Electron Diffraction ◽  
Intermetallic Alloys ◽  
Beam Electron ◽  
Transmission Electron ◽  
Convergent Beam

The antiphase domain structure in Ni3Al and Al3Ti+Cu intermetallic alloys was recognized by conventional transmission electron microscopy and large angle convergent beam electron diffraction methods. In the case of antiphase boundary the superlattice excess line is split into two lines with equal intensity on bright and dark field LACBED pattern. This splitting can be considered as typical and used to identify APBs. The recognition between perfect structure of the defect-free matrix and the screw deviation around the nanopipes in GaN epilayers was performed with high accuracy using Zone Axis LACBED images.

A large angle convergent beam electron diffraction study of the core nature of dislocations in 3C-SiC

1996 ◽  
Vol 11 (4) ◽  
pp. 884-894 ◽  
Author(s):  
X. J. Ning ◽  
P. Pirouz
Keyword(s):  
Electron Microscopy ◽  
Electron Diffraction ◽  
Partial Dislocation ◽  
Large Angle ◽  
Electron Diffraction Study ◽  
Convergent Beam Electron Diffraction ◽  
Beam Electron ◽  
The Core ◽  
Partial Dislocations ◽  
Convergent Beam

Dislocations produced by 1300 °C indentation of the silicon-terminated (111) face of 3C-SiC were investigated by transmission electron microscopy. They were all found to be either widely separated partial dislocation pairs, or else, arrays of single partial dislocation half-loops on neighboring parallel slip planes and having the same Burgers vector. It was concluded that in the latter case, each array consisted of leading partial dislocations which had nucleated without accompanying trailing partial dislocations. The core nature of both dissociated dislocations and arrays of single partial dislocations has been determined by the technique of large angle convergent beam electron diffraction. The results indicate that the core of all single partial dislocation half-loops constituting an array consists of silicon atoms. It is concluded that, with the present deformation geometry, the Si-core partial dislocations are preferentially nucleated before the C-core partial dislocations. In the case of a dissociated dislocation, when a pair of partials was present, electron microscopy observations revealed that the morphology of the two partial dislocations was very different; while the Si-core partials were smooth, the C-core partial dislocations had a zig-zag morphology.

Detection of Characteristic Signals from As-Doped (less than 1 at.%) Regions of Silicon by Transmission Electron Microscopy and Convergent-beam Electron Diffraction

2004 ◽  
Vol 10 (S02) ◽  
pp. 338-339
Author(s):  
Masami Terauchi ◽  
Kenji Tsuda ◽  
Hajime Mitsuishi ◽  
Kazuo Kawamura
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Electron Diffraction ◽  
Convergent Beam Electron Diffraction ◽  
Beam Electron ◽  
Transmission Electron ◽  
Convergent Beam

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

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