Surface morphology change of protective film on collector mirror related to implantation of Sn emitted from laser produced plasma in EUV light source

2020 ◽  
Vol 13 (11) ◽  
pp. 115501
Author(s):  
Yoshiyuki Honda ◽  
Tatsuya Yanagida ◽  
Yutaka Shiraishi ◽  
Masayuki Morita ◽  
Masahiko Andou ◽  
...  
Keyword(s):  
Surface Morphology ◽  
Light Source ◽  
Protective Film ◽  
Morphology Change ◽  
Laser Produced Plasma

Development of laser-produced plasma-based EUV light source technology for HVM EUV lithography

2012 ◽  
Author(s):  
Junichi Fujimoto ◽  
Tsukasa Hori ◽  
Tatsuya Yanagida ◽  
Takeshi Ohta ◽  
Yasufumi Kawasuji ◽  
...  
Keyword(s):  
Light Source ◽  
Euv Lithography ◽  
Laser Produced Plasma

Performance of liquid xenon jet laser-produced-plasma light source for EUV lithography

2004 ◽  
Author(s):  
Takashi Suganuma ◽  
Tamotsu Abe ◽  
Hiroshi Komori ◽  
Yuichi Takabayashi ◽  
Akira Endo
Keyword(s):  
Light Source ◽  
Liquid Xenon ◽  
Euv Lithography ◽  
Laser Produced Plasma

Laser-produced plasma light source for extreme ultraviolet lithography

2013 ◽  
Vol 6 (1) ◽  
pp. 20-33
Author(s):  
窦银萍 DOU Yin-ping ◽  
孙长凯 SUN Chang-kai ◽  
林景全 LIN Jing-quan
Keyword(s):  
Light Source ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Laser Produced Plasma

Research progress on laser-produced plasma light source for 13.5 nm extreme ultraviolet lithography

2020 ◽  
Vol 13 (1) ◽  
pp. 28-42
Author(s):  
宗 楠 ZONG Nan ◽  
胡蔚敏 HU Wei-min ◽  
王志敏 WANG Zhi-min ◽  
王小军 WANG Xiao-jun ◽  
张申金 ZHANG Shen-jin ◽  
...  
Keyword(s):  
Light Source ◽  
Extreme Ultraviolet ◽  
Research Progress ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Laser Produced Plasma

Laser-produced-plasma light source for EUV lithography

2005 ◽  
Author(s):  
Georg Soumagne ◽  
Tamotsu Abe ◽  
Takashi Suganuma ◽  
Yousuke Imai ◽  
Hiroshi Someya ◽  
...  
Keyword(s):  
Light Source ◽  
Euv Lithography ◽  
Laser Produced Plasma

Metrology of laser-produced plasma light source for EUV lithography

2005 ◽  
Author(s):  
N. R. Boewering ◽  
J. R. Hoffman ◽  
O. V. Khodykin ◽  
C. L. Rettig ◽  
B. A. M. Hansson ◽  
...  
Keyword(s):  
Light Source ◽  
Euv Lithography ◽  
Laser Produced Plasma

Preparation and surface morphology change observation of hybrid bilayer membranes

2006 ◽  
Vol 499 (1-2) ◽  
pp. 40-43 ◽  
Author(s):  
Yasuhiro Nishimura ◽  
Robert Wagner ◽  
Takaaki Manaka ◽  
Mitsumasa Iwamoto
Keyword(s):  
Surface Morphology ◽  
Bilayer Membranes ◽  
Morphology Change ◽  
Hybrid Bilayer Membranes

A wettability switchable surface by microscale surface morphology change

2007 ◽  
Vol 17 (3) ◽  
pp. 489-495 ◽  
Author(s):  
Ting-Hsuan Chen ◽  
Yun-Ju Chuang ◽  
Ching-Chang Chieng ◽  
Fan-Gang Tseng
Keyword(s):  
Surface Morphology ◽  
Morphology Change
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