Experiments on Atmospheric Pressure Microwave Plasmas Produced in a He/CH₄ Mixture

The MICAP is a microwave driven plasma source employing nitrogen as the plasma gas. In this work we compare LODs and LOQs obtained in axial viewing with those obtained by ICP-OES and evaluate the effect of air instead of nitrogen as the plasma gas.

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Optical emission spectroscopy of atmospheric pressure microwave plasmas

Journal of Applied Physics ◽

10.1063/1.2975345 ◽

2008 ◽

Vol 104 (5) ◽

pp. 054908 ◽

Cited By ~ 12

Author(s):

Haijun Jia ◽

Hiroyuki Fujiwara ◽

Michio Kondo ◽

Hiroshi Kuraseko

Keyword(s):

Atmospheric Pressure ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Microwave Plasmas

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Hydrogen production by conversion of ethanol using atmospheric pressure microwave plasmas

International Journal of Hydrogen Energy ◽

10.1016/j.ijhydene.2015.06.101 ◽

2015 ◽

Vol 40 (40) ◽

pp. 14039-14044 ◽

Cited By ~ 23

Author(s):

D. Czylkowski ◽

B. Hrycak ◽

R. Miotk ◽

M. Jasiński ◽

M. Dors ◽

...

Keyword(s):

Hydrogen Production ◽

Atmospheric Pressure ◽

Microwave Plasmas

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Microwave plasmas at atmospheric pressure: theoretical insight and applications in surface treatment

The European Physical Journal Applied Physics ◽

10.1051/epjap:2008022 ◽

2008 ◽

Vol 42 (1) ◽

pp. 41-46 ◽

Cited By ~ 5

Author(s):

T. Belmonte ◽

R. P. Cardoso ◽

C. Noël ◽

G. Henrion ◽

F. Kosior

Keyword(s):

Surface Treatment ◽

Atmospheric Pressure ◽

Microwave Plasmas ◽

Theoretical Insight

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Optical emission spectroscopy of microwave-plasmas at atmospheric pressure applied to the growth of organosilicon and organotitanium nanopowders

Journal of Applied Physics ◽

10.1063/1.4868899 ◽

2014 ◽

Vol 115 (11) ◽

pp. 113301 ◽

Cited By ~ 14

Author(s):

A. Kilicaslan ◽

O. Levasseur ◽

V. Roy-Garofano ◽

J. Profili ◽

M. Moisan ◽

...

Keyword(s):

Atmospheric Pressure ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Microwave Plasmas

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(Invited) Microwave Plasmas Applied for Synthesis of Free-Standing Carbon Nanostructures at Atmospheric Pressure Conditions

ECS Meeting Abstracts ◽

10.1149/ma2016-01/18/1062 ◽

2016 ◽

Keyword(s):

Atmospheric Pressure ◽

Carbon Nanostructures ◽

Free Standing ◽

Microwave Plasmas

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Reduction of perfluorinated compound emissions using atmospheric pressure microwave plasmas: Mechanisms and energy efficiency

Pure and Applied Chemistry ◽

10.1351/pac200678061173 ◽

2006 ◽

Vol 78 (6) ◽

pp. 1173-1185 ◽

Cited By ~ 10

Author(s):

M. Nantel-Valiquette ◽

Y. Kabouzi ◽

E. Castaños-Martinez ◽

K. Makasheva ◽

M. Moisan ◽

...

Keyword(s):

Energy Efficiency ◽

Atmospheric Pressure ◽

Swirling Flow ◽

Excitation Frequency ◽

Soda Lime ◽

Gas Mixture ◽

Microwave Plasmas ◽

Nitrogen Gas ◽

Perfluorinated Compound ◽

Microwave Excitation

The abatement of perfluorinated compound (PFC) gases is investigated using atmospheric pressure microwave-surface-wave plasmas. These PFCs are diluted in nitrogen gas with concentration ranging from 5000 to 10 000 ppmv. The abatement mechanisms of SF6 and CF4 are examined, and conversion schemes are presented in the case where oxygen is added to the gas mixture. The PFC fragments are oxidized, forming acid-like by-products that are finally trapped irreversibly using a humidified soda lime scrubber. Gas-phase analysis was performed using Fourier transform infrared (FTIR) spectroscopy. The abatement efficiency is found to increase with increasing absorbed microwave power and gas residence time. The energy efficiency of the abatement process is shown to increase, with PFC concentrations in the gas mixture up to 10 000 ppmv. A complete conversion of SF6 is achieved for energy densities ranging from 700 to 1200 J/cm3 for concentrations ranging from 5000 to 10 000 ppmv. Lowering the microwave excitation frequency and using swirling flow are shown to reduce the energy cost per abated molecule.

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