Optimum Design of a Planar 3-DOF Ultra-Precision Positioning Mechanism Using a Booster

2006 ◽  
pp. 667-672
Author(s):  
Seok Yoon Han ◽  
J.O. Kim ◽  
J.Y. Park ◽  
Byung Ju Yi ◽  
G.B. Chung
Keyword(s):  
Optimum Design ◽  
Precision Positioning ◽  
Ultra Precision

Optimum Design of a Planar 3-DOF Ultra-Precision Positioning Mechanism Using a Booster

2006 ◽  
Vol 306-308 ◽  
pp. 667-672
Author(s):  
Seok Yoon Han ◽  
J.O. Kim ◽  
J.Y. Park ◽  
Byung Ju Yi ◽  
G.B. Chung
Keyword(s):  
Natural Frequency ◽  
Optimum Design ◽  
Theoretical Approach ◽  
Close Agreement ◽  
Flexure Hinge ◽  
Functional Requirements ◽  
Optimal Parameters ◽  
Precision Positioning ◽  
Positioning Systems ◽  
Ultra Precision

Ultra-precision positioning systems basically require high natural frequency and sufficient workspace. To cope with this requirement, flexure hinge mechanisms have been proposed. However, previous designs have difficulty satisfying the functional requirements of the system due to problems in the modeling and optimization process since they are coupled. Therefore, this paper performs optimum design of a planar 3-D ultra-precision positioning mechanism using a booster based on axiomatic design. Based on preliminary kinematic analysis and dynamic modeling of the system, an optimum design is conducted. To examine the effectiveness of the optimal parameters obtained by a theoretical approach, a simulation is performed by FEM. The simulation result shows that a natural frequency of 200.53Hz and a workspace of 200 μm x 200 μm can be ensured, which is in very close agreement with the specified goal of design.

Modeling and Validation of Ultra Precision Positioning System

2011 ◽  
Vol 87 ◽  
pp. 200-205 ◽  
Author(s):  
Jing Shu Wang ◽  
Li Ting Sun ◽  
Ming Chi Feng ◽  
Chang An Zhu
Keyword(s):  
Rigid Body ◽  
Elastic Body ◽  
Stable State ◽  
Least Square ◽  
Positioning System ◽  
Precision Positioning ◽  
Unknown Parameters ◽  
Body Model ◽  
Rigid Body Model ◽  
Ultra Precision

Base on the significance of understanding research objects, modeling and validation of ultra precision positioning system is studied in this paper. Taking different reduction methods of leaf springs into consideration, a rigid body model and an elastic body model has been developed. Identifying unknown parameters by the least square method, the validation results of two models are compared. The conclusion indicates that the elastic body model is better when the dynamic characteristics of the positioning system before the stable state are concerned and the rigid body model is more appropriate if the accuracy of the whole model is focused.

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