An Investigation into the Effect of Design Parameters on Plasma Density in Dielectric Barrier Discharges (DBD)

2013 ◽  
Vol 742 ◽  
pp. 469-475 ◽  
Author(s):  
Jong Bong Kim ◽  
Myoung Soo Shin

DBD (Dielectric Barrier Discharges) plasma is often used to clean the surface of semiconductors. The cleaning performance is affected by many process parameters such as electric voltage, the gas composition, gas speed, thickness of the dielectric wall, gap distance, and plasma duration time. In this study, the plasma density is predicted by a coupled simulation of gas flow, chemistry mixing and reaction, plasma generation, and electric field. A 13.56 MHz RF source is used to generate plasma. The effect of the dielectric thickness, the gap distance, the gas flow velocity, and electric voltage on the plasma density is investigated. It is shown that the plasma density increases as the dielectric thickness decreases, the gap distance increases, the gas velocity increases, and electric voltage increases, respectively. Finally, experiments are carried out to verify the analysis results.

2005 ◽  
Vol 8 (2) ◽  
Author(s):  
How Ming Lee ◽  
Moo Been Chang

AbstractThis study developed a model to simulate ozone synthesis in dry oxygen streams with a coaxial dielectric barrier discharge (DBD) reactor. Analyzing ozone synthesis chemistry, we found that fast quenching metastable species seems favorable for ozone production. This interpretation was successfully confirmed by the experiment conducted with a packed-bed DBD reactor. Ozone concentration generated by the packed-bed DBD reactor was significantly enhanced compared to non-packed one. Model simulations were carried out to elucidate the effects of reactor geometries on ozone synthesis. Parameters in the simulation include radii of inner and outer electrodes, dielectric thickness, dielectric constant, and discharge gap. More details regarding their effects were extensively discussed in the paper. In brief, a DBD reactor with a thinner dielectric thickness and/ or a greater dielectric constant could achieve higher ozone yields.


2021 ◽  
Vol 129 (15) ◽  
pp. 153305
Author(s):  
Hui Li ◽  
Chengxun Yuan ◽  
Anatoly Kudryavtsev ◽  
Aleksandr Astafiev ◽  
Evgeny Bogdanov ◽  
...  

2021 ◽  
Vol 42 ◽  
pp. 102175
Author(s):  
Andere Clement Miruka ◽  
Ai Zhang ◽  
Qiancheng Wang ◽  
Dahai Zhu ◽  
Zheng Wang ◽  
...  

2021 ◽  
Vol 18 (4) ◽  
pp. 2000234
Author(s):  
Quan‐Zhi Zhang ◽  
Li Zhang ◽  
De‐Zheng Yang ◽  
Julian Schulze ◽  
You‐Nian Wang ◽  
...  

2005 ◽  
Vol 33 (3) ◽  
pp. 1041-1046 ◽  
Author(s):  
Yongho Kim ◽  
Kwan-Tae Kim ◽  
Min Suk Cha ◽  
Young-Hoon Song ◽  
Seock Joon Kim

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