Silicon Thermal Flow Sensor Based on Ceramic Substrate

2014 ◽  
Vol 609-610 ◽  
pp. 1060-1065
Author(s):  
Sheng Qi Chen ◽  
Lin Zhou ◽  
Ming Qin
Keyword(s):  
Heat Sink ◽  
Ceramic Substrate ◽  
Flow Sensor ◽  
Thermal Flow ◽  
Ansys Software ◽  
Ansys Simulation ◽  
Thermal Flow Sensor ◽  
Flow Test ◽  
Package Size ◽  
Speed Up

A silicon thermal flow-sensor system based on ceramic substrate is described in this paper. The sensor chip is mounted on a ceramic substrate with a metal heat sink. The simulation by ANSYS software and the experiment are done for determining suitable package size. The results from the ANSYS simulation and the standard flow test in the flow tunnel show that when the radius of the ceramic is 10mm and the heat conduction is35Wm-1K-1, the performance of the sensor is much better. The heat sink will make the flow-sensor more stable. The wind speed up to 35m/s and the precision of 0.5m/s are acquired in this experiment.

Fluid Independent Thermal Flow Sensor using Constant-Temperature Anemometry and the 3ω-Method

2021 ◽  
Author(s):  
Ralf E. Bernhardsgrutter ◽  
Christoph J. Hepp ◽  
Katrin Schmitt ◽  
Jurgen Wollenstein
Keyword(s):  
Constant Temperature ◽  
Flow Sensor ◽  
Thermal Flow ◽  
3Ω Method ◽  
Thermal Flow Sensor

scholarly journals A Thermal Flow Sensor Based on Printed Circuit Technology in Constant Temperature Mode for Various Fluids

Sensors ◽  
2019 ◽  
Vol 19 (5) ◽  
pp. 1065 ◽  
Author(s):  
Thomas Glatzl ◽  
Roman Beigelbeck ◽  
Samir Cerimovic ◽  
Harald Steiner ◽  
Florian Wenig ◽  
...  
Keyword(s):  
Constant Temperature ◽  
Volume Flow Rate ◽  
Form Factors ◽  
Flow Sensor ◽  
Circuit Board ◽  
Thermal Flow ◽  
Fem Simulations ◽  
Printed Circuit ◽  
Thermal Flow Sensor ◽  
Temperature Mode

We present a thermal flow sensor designed for measuring air as well as water flow velocities in heating, ventilation, and air conditioning (HVAC) systems. The sensor is designed to integrate the flow along the entire diameter of the pipe also quantifying the volume flow rate of the streaming fluid where the calorimetric principle in constant temperature operation is utilized as a readout method. In the constant temperature mode, a controller keeps a specific excess temperature between sensing elements at a constant level resulting in a flow dependent heater voltage. To achieve cost-effective sensors, the fabrication of the transducer is fully based on printed circuit board technology allowing low-cost mass production with different form factors. In addition, 2D-FEM simulations were carried out in order to predict the sensor characteristic of envisaged setups. The simulation enables a fast and easy way to evaluate the sensor’s behaviour in different fluids. The results of the FEM simulations are compared to measurements in real environments, proving the credibility of the model.

Fabrication and testing of a SU-8 thermal flow sensor

2010 ◽  
Vol 147 (2) ◽  
pp. 411-417 ◽  
Author(s):  
R. Vilares ◽  
C. Hunter ◽  
I. Ugarte ◽  
I. Aranburu ◽  
J. Berganzo ◽  
...  
Keyword(s):  
Flow Sensor ◽  
Thermal Flow ◽  
Thermal Flow Sensor

scholarly journals A Micromachined Thermal Flow Sensor Applied to A PC Mouse Device

2006 ◽  
Vol 126 (11) ◽  
pp. 607-611
Author(s):  
Sho Sasaki ◽  
Takeshi Fujiwara ◽  
Satoshi Nozoe ◽  
Fumihiko Sato ◽  
Koichi Imanaka ◽  
...  
Keyword(s):  
Flow Sensor ◽  
Thermal Flow ◽  
Thermal Flow Sensor
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