Electrical Properties of p-Type In-Situ Doped vs. Al-Implanted 4H-SiC
2005 ◽
Vol 483-485
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pp. 401-404
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Keyword(s):
We report a detailed investigation of the electrical properties of p-type 4H-SiC. In the range 100 K-800 K we show that, both, the temperature dependence of the hole concentration and Hall mobility is satisfactorily described using the relaxation time approximation. Performing a detailed comparison of in-situ vs. implantation doping, we evidence an incomplete activation of the dose (about 50 ±10 %) with apparition of a large number of compensating centres in the implanted layers.
2016 ◽
Vol 858
◽
pp. 249-252
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Keyword(s):
1967 ◽
Vol 302
(1468)
◽
pp. 83-98
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2005 ◽
Vol 19
(06)
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pp. 1017-1027
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