Characterization of V-Defects in InGaN Single-Quantum-Well Films at Nanometer Level by High Spatial Resolution Cathodoluminescence Spectroscopy

2008 ◽  
Vol 600-603 ◽  
pp. 1305-1308
Author(s):  
Masanobu Yoshikawa ◽  
Masataka Murakami ◽  
Takaya Fujita ◽  
K. Inoue ◽  
K. Matsuda ◽  
...  

We have measured cathodoluminescence (CL) spectra in the vicinity of V-defects in InGaN single-quantum-well(SQW) films at nanometer level, using newly developed CL apparatus (SE-SEM-CL). From spectroscopic CL measurement, it has been found that the spectra change dramatically in the vicinity of V-defects in the region of £50nm. The SE-SEM-CL has a potential to detect the CL spectral variation at spatial resolution with £50nm.

2008 ◽  
Vol 62 (1) ◽  
pp. 86-90 ◽  
Author(s):  
M. Yoshikawa ◽  
M. Murakami ◽  
H. Ishida ◽  
H. Harima

We have developed a new scanning electron microscope (SEM) equipped with a Schottky emission (SE) gun that produces a high probe current at an acceleration voltage of less than 5 kV and a cathodoluminescence (CL) spectroscopic system (SE-SEM-CL) equipped with an SE gun and a newly designed parabolic mirror that has a very short working distance of 9 mm in order to enhance the spatial resolution of CL spectroscopy. We have studied CL spectral variations in the vicinity of V-defects in InGaN single quantum well (SQW) film by measuring its CL spectra at the nanometer level, using our SE-SEM-CL system. It has been found that the peak intensity and peak wavelength of the CL peak around 454 nm assigned to the quantum wells emission of the InGaN SQW layer significantly change in the vicinity of the V-defects. We have considered that the change in the peak wavelength is mainly caused by a change in the In content in the InGaN SQW layer. Our SE-SEM-CL has a spatial resolution of less than 40 nm for the InGaN SQW layer.


2002 ◽  
Vol 92 (12) ◽  
pp. 7153-7156 ◽  
Author(s):  
M. Yoshikawa ◽  
K. Matsuda ◽  
Y. Yamaguchi ◽  
T. Matsunobe ◽  
Y. Nagasawa ◽  
...  

1995 ◽  
Vol 7 (7) ◽  
pp. 718-720 ◽  
Author(s):  
C.H. Wu ◽  
P.S. Zory ◽  
M.A. Emanuel

2010 ◽  
Vol 49 (4) ◽  
pp. 04DH03
Author(s):  
Hooyoung Song ◽  
Jin Soak Kim ◽  
Eun Kyu Kim ◽  
Yong Gon Seo ◽  
Sung-Min Hwang

2015 ◽  
Author(s):  
K. Prabakaran ◽  
R. Ramesh ◽  
M. Jayasakthi ◽  
R. Loganathan ◽  
P. Arivazhagan ◽  
...  

2013 ◽  
Vol 80 (4) ◽  
pp. 565-570 ◽  
Author(s):  
P. Sangeetha ◽  
V. Sasirekha ◽  
R. Vadivelu ◽  
K. Kishino ◽  
V. Ramakrishnan

Sign in / Sign up

Export Citation Format

Share Document