scholarly journals Diamond Synthesis from Gas Phase by Microwave Plasma CVD.

1992 ◽  
Vol 68 (2) ◽  
pp. 131-139
Author(s):  
Mutsukazu Kamo
Keyword(s):  
Gas Phase ◽  
Microwave Plasma ◽  
Diamond Synthesis ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd

scholarly journals Gas Phase Synthesis of Diamond on a Silicon with Microwave Plasma CVD (1st Report)

1988 ◽  
Vol 54 (9) ◽  
pp. 1703-1708 ◽  
Author(s):  
Masanori YOSHIKAWA ◽  
Yutaka KANEKO ◽  
Cheng-Feng YANG ◽  
Hitoshi TOKURA ◽  
Mutukazu KAMO
Keyword(s):  
Gas Phase ◽  
Microwave Plasma ◽  
Plasma Cvd ◽  
Phase Synthesis ◽  
Gas Phase Synthesis ◽  
Microwave Plasma Cvd

Hot Spot Formation in Microwave Plasma CVD Diamond Synthesis

2011 ◽  
Vol 39 (11) ◽  
pp. 2790-2791 ◽  
Author(s):  
Kadek W. Hemawan ◽  
Chih S. Yan ◽  
Qi Liang ◽  
Joseph Lai ◽  
Yufei Meng ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
Hot Spot ◽  
Cvd Diamond ◽  
Diamond Synthesis ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd ◽  
Hot Spot Formation ◽  
Spot Formation
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