Using the association of the low-cost screen-printing technology with the sacrificial layer method, the feasibility of totally released piezoelectric thick-films microceramics of gold electroded PZT type is studied. After the deposition of the sacrificial layer on an alumina substrate and subsequent printing and drying of gold, PZT and gold layers, the final firing is performed at low temperature. This is followed by the releasing step of the Au/PZT/Au in diluted acidic solution. Impedance analysis shows that the electrical properties and electromechanical coefficients of poled PZT thick-films are still lower than those of PZT ceramics. This result is correlated to the high porosity rate of the PZT layer. However these piezoelectric microceramics present a good electromechanical behaviour and can be used as sensors when solicited by vibrations or as actuators to generate vibrations in a structure on which they are bonded. Moreover, the successful fabrication associated to a good electromechanical signature on a metallic test structure suggests Structural Health Monitoring applications.
A Simple Analytical Model for MEMS Cantilever Beam Piezoelectric Accelerometer and High Sensitivity Design for SHM (structural health monitoring) Applications
