Study on ignition performance of tantalum nitride film energy exchangers based on new bridge area

In order to reduce the ignition energy of the tantalum nitride film transducer, a new type of energy exchangers bridge area was designed in this paper, and it was fabricated by MEMS technology. The parameters of ignition voltage, ignition energy, as well as action time were tested. The experimental results showed that in terms of ignition voltage, ignition energy, and action time, the value of the energy exchangers element of the new bridge area was lower than the value of the energy exchangers element of the conventional bridge area. In addition, ignition performance can be reduced by many energy exchangers in the new bridge area.

Study on the Ignition Performance of TaN Transducer by Heat Treatment

In order to obtain good TaN film transducer and reduce its ignition voltage, the influence of the setting position and cooling method of the heat treatment process on the TaN film transducer were compared and analyzed. By measuring the square resistivity, SEM and XRD, the performance of the film before and after heat treatment were characterized. The ignition voltage of the TaN film transducer was tested, and the results showed that the ignition voltage of the heat-treated TaN film transducer could be reduced a lot. It provided a technical way for the micro-energy of MEMS pyrotechnics.

A Robust Infrared Transducer of an Ultra-Large-Scale Array

A robust micro-electro-mechanical systems (MEMS) infrared thin film transducer of an ultra-large-scale array was proposed and fabricated on a 4-inch silicon wafer. The silicon substrate and micro cavities were introduced. This novel transducer had excellent mechanical stability, time response, and state-of-the-art pixel scale. It could bear a load of 1700 g and its load pressure was improved by more than 5.24 times and time constant decreased by 50.7% compared to the traditional soft infrared thin film transducer. The array scale of its pixels exceeded 2k × 2k. The simulation and measured results of the transient temperature and radiation intensity were well consistent. Illuminated by a 532 nm laser with a frequency of 50 Hz and 50% duty cycle, the thermal decay time of the proposed transducer was 6.0 ms. A knife-edge image was utilized for spatial resolution test and the full width at half maximum (FWHM) of the proposed transducer was 24% smaller than the traditional soft one. High-resolution infrared images were generated using the proposed robust transducer. These results proved that the robust transducer was promising in infrared image generation.