Efficient finite-difference schemes in thermal analysis and inverse lithography for integrated circuit manufacturing

2010 ◽  
Author(s):  
Yijiang Shen
Keyword(s):  
Thermal Analysis ◽  
Finite Difference ◽  
Integrated Circuit ◽  
Difference Schemes ◽  
Finite Difference Schemes ◽  
Integrated Circuit Manufacturing

scholarly journals Conservative finite difference schemes for the modified Camassa-Holm equation

JSIAM Letters ◽  
2011 ◽  
Vol 3 (0) ◽  
pp. 37-40 ◽  
Author(s):  
Yuto Miyatake ◽  
Takayasu Matsuo ◽  
Daisuke Furihata
Keyword(s):  
Finite Difference ◽  
Difference Schemes ◽  
Finite Difference Schemes ◽  
Holm Equation
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