A Study on the Bottom Impedance Tuning Circuit of PE-CVD Chamber

Author(s):  
Hyun-Chul Wang ◽  
Hwa-Il Seo
Keyword(s):  
2021 ◽  
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Karolis Kiela ◽  
Marijan Jurgo ◽  
Vytautas Macaitis ◽  
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2001 ◽  
Vol 79 (3) ◽  
pp. 436-438 ◽  
Author(s):  
B. D. Jackson ◽  
A. M. Baryshev ◽  
G. de Lange ◽  
J.-R. Gao ◽  
S. V. Shitov ◽  
...  
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2007 ◽  
Vol E90-C (6) ◽  
pp. 1247-1252
Author(s):  
O. WATANABE ◽  
R. ITO ◽  
S. SAIGUSA ◽  
T. ARAI ◽  
T. ITAKURA

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