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CO2 Laser Produced Tin Plasma Light Source as the Solution for EUV Lithography
Lithography
◽
10.5772/8175
◽
2010
◽
Cited By ~ 3
Author(s):
Akira Endo
Keyword(s):
Light Source
◽
Euv Lithography
◽
Tin Plasma
Download Full-text
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Cited By
References
Investigation of debris dynamics from laser-produced tin plasma for EUV lithography light source
Applied Physics A
◽
10.1007/s00339-008-4566-3
◽
2008
◽
Vol 92
(4)
◽
pp. 767-772
◽
Cited By ~ 2
Author(s):
D. Nakamura
◽
K. Tamaru
◽
T. Akiyama
◽
A. Takahashi
◽
T. Okada
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Light Source
◽
Euv Lithography
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Imaging Diagnostics of Debris from Laser-Produced Tin Plasma with Droplet Target for EUV Light Source
Journal of Laser Micro/Nanoengineering
◽
10.2961/jlmn.2008.03.0012
◽
2008
◽
Vol 3
(3)
◽
pp. 196-200
◽
Cited By ~ 2
Author(s):
Daisuke Nakamura
Keyword(s):
Light Source
◽
Imaging Diagnostics
◽
Tin Plasma
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Development of laser-produced plasma-based EUV light source technology for HVM EUV lithography
10.1117/12.916093
◽
2012
◽
Cited By ~ 11
Author(s):
Junichi Fujimoto
◽
Tsukasa Hori
◽
Tatsuya Yanagida
◽
Takeshi Ohta
◽
Yasufumi Kawasuji
◽
...
Keyword(s):
Light Source
◽
Euv Lithography
◽
Laser Produced Plasma
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Performance of liquid xenon jet laser-produced-plasma light source for EUV lithography
10.1117/12.596356
◽
2004
◽
Author(s):
Takashi Suganuma
◽
Tamotsu Abe
◽
Hiroshi Komori
◽
Yuichi Takabayashi
◽
Akira Endo
Keyword(s):
Light Source
◽
Liquid Xenon
◽
Euv Lithography
◽
Laser Produced Plasma
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Radiative Properties and Hydrodynamics of Laser Produced Tin Plasma for Efficient Extreme Ultraviolet Light Source
Springer Proceedings in Physics - X-Ray Lasers 2006
◽
10.1007/978-1-4020-6018-2_77
◽
2008
◽
pp. 607-618
Author(s):
S. Fujioka
◽
H. Nishimura
◽
K. Nishihara
◽
Y. Tao
◽
T. Aota
◽
...
Keyword(s):
Light Source
◽
Ultraviolet Light
◽
Extreme Ultraviolet
◽
Radiative Properties
◽
Tin Plasma
◽
Extreme Ultraviolet Light
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A comparative study on the performance of a xenon capillaryZ-pinch EUV lithography light source using a pinhole camera
Plasma Sources Science and Technology
◽
10.1088/0963-0252/15/3/004
◽
2006
◽
Vol 15
(3)
◽
pp. 322-327
◽
Cited By ~ 9
Author(s):
Inho Song
◽
Kazuhiro Iwata
◽
Yusuke Homma
◽
Smruti R Mohanty
◽
Masato Watanabe
◽
...
Keyword(s):
Comparative Study
◽
Light Source
◽
Pinhole Camera
◽
Euv Lithography
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Laser-produced-plasma light source for EUV lithography
10.1117/12.599333
◽
2005
◽
Cited By ~ 11
Author(s):
Georg Soumagne
◽
Tamotsu Abe
◽
Takashi Suganuma
◽
Yousuke Imai
◽
Hiroshi Someya
◽
...
Keyword(s):
Light Source
◽
Euv Lithography
◽
Laser Produced Plasma
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Metrology of laser-produced plasma light source for EUV lithography
10.1117/12.600809
◽
2005
◽
Cited By ~ 2
Author(s):
N. R. Boewering
◽
J. R. Hoffman
◽
O. V. Khodykin
◽
C. L. Rettig
◽
B. A. M. Hansson
◽
...
Keyword(s):
Light Source
◽
Euv Lithography
◽
Laser Produced Plasma
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Diagnostics of ablation dynamics of tin micro-droplet for EUV lithography light source
2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics
◽
10.1109/cleopr.2009.5292242
◽
2009
◽
Author(s):
D. Nakamura
◽
K. Okazaki
◽
T. Akiyama
◽
K. Toya
◽
A. Takahashi
◽
...
Keyword(s):
Light Source
◽
Euv Lithography
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Progress of a laser-produced-plasma light source for EUV lithography
Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference
◽
10.1109/imnc.2003.1268753
◽
2004
◽
Author(s):
H. Komori
◽
T. Abe
◽
T. Suganuma
◽
Y. Imai
◽
H. Someya
◽
...
Keyword(s):
Light Source
◽
Euv Lithography
◽
Laser Produced Plasma
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