Progress of a laser-produced-plasma light source for EUV lithography

2004 ◽  
Author(s):  
H. Komori ◽  
T. Abe ◽  
T. Suganuma ◽  
Y. Imai ◽  
H. Someya ◽  
...  
Keyword(s):  
Light Source ◽  
Euv Lithography ◽  
Laser Produced Plasma

Development of laser-produced plasma-based EUV light source technology for HVM EUV lithography

2012 ◽  
Author(s):  
Junichi Fujimoto ◽  
Tsukasa Hori ◽  
Tatsuya Yanagida ◽  
Takeshi Ohta ◽  
Yasufumi Kawasuji ◽  
...  
Keyword(s):  
Light Source ◽  
Euv Lithography ◽  
Laser Produced Plasma

Performance of liquid xenon jet laser-produced-plasma light source for EUV lithography

2004 ◽  
Author(s):  
Takashi Suganuma ◽  
Tamotsu Abe ◽  
Hiroshi Komori ◽  
Yuichi Takabayashi ◽  
Akira Endo
Keyword(s):  
Light Source ◽  
Liquid Xenon ◽  
Euv Lithography ◽  
Laser Produced Plasma

Laser-produced-plasma light source for EUV lithography

2005 ◽  
Author(s):  
Georg Soumagne ◽  
Tamotsu Abe ◽  
Takashi Suganuma ◽  
Yousuke Imai ◽  
Hiroshi Someya ◽  
...  
Keyword(s):  
Light Source ◽  
Euv Lithography ◽  
Laser Produced Plasma

Metrology of laser-produced plasma light source for EUV lithography

2005 ◽  
Author(s):  
N. R. Boewering ◽  
J. R. Hoffman ◽  
O. V. Khodykin ◽  
C. L. Rettig ◽  
B. A. M. Hansson ◽  
...  
Keyword(s):  
Light Source ◽  
Euv Lithography ◽  
Laser Produced Plasma

100W 1st generation laser-produced plasma light source system for HVM EUV lithography

2011 ◽  
Author(s):  
Hakaru Mizoguchi ◽  
Tamotsu Abe ◽  
Yukio Watanabe ◽  
Takanobu Ishihara ◽  
Takeshi Ohta ◽  
...  
Keyword(s):  
Light Source ◽  
Euv Lithography ◽  
Laser Produced Plasma

Performance of a 10-kHz laser-produced-plasma light source for EUV lithography

2004 ◽  
Author(s):  
Tamotsu Abe ◽  
Takashi Suganuma ◽  
Yousuke Imai ◽  
Hiroshi Someya ◽  
Hideo Hoshino ◽  
...  
Keyword(s):  
Light Source ◽  
Euv Lithography ◽  
Laser Produced Plasma

Development of liquid-jet laser-produced plasma light source for EUV lithography

2003 ◽  
Author(s):  
Tamotsu Abe ◽  
Takashi Suganuma ◽  
Yousuke Imai ◽  
Yukihiko Sugimoto ◽  
Hiroshi Someya ◽  
...  
Keyword(s):  
Light Source ◽  
Liquid Jet ◽  
Euv Lithography ◽  
Laser Produced Plasma

Surface morphology change of protective film on collector mirror related to implantation of Sn emitted from laser produced plasma in EUV light source

2020 ◽  
Vol 13 (11) ◽  
pp. 115501
Author(s):  
Yoshiyuki Honda ◽  
Tatsuya Yanagida ◽  
Yutaka Shiraishi ◽  
Masayuki Morita ◽  
Masahiko Andou ◽  
...  
Keyword(s):  
Surface Morphology ◽  
Light Source ◽  
Protective Film ◽  
Morphology Change ◽  
Laser Produced Plasma
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