Surface Morphology and Tribological Properties of Nanoscale (Ti, Al, Si, C)N Multilayer Coatings Deposited by Reactive Magnetron Sputtering

Lubrication - Tribology, Lubricants and Additives ◽

10.5772/intechopen.73141 ◽

2018 ◽

Author(s):

Mei Wang ◽

Shojiro Miyake

Keyword(s):

Surface Morphology ◽

Magnetron Sputtering ◽

Tribological Properties ◽

Reactive Magnetron Sputtering ◽

Multilayer Coatings ◽

Reactive Magnetron

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Microstructure, mechanical and tribological properties of TaCN composite films by reactive magnetron sputtering

Ceramics International ◽

10.1016/j.ceramint.2020.04.205 ◽

2020 ◽

Vol 46 (13) ◽

pp. 20683-20694

Author(s):

Dian Yu ◽

Lihua Yu ◽

Pei Jia ◽

Hongbo Ju ◽

Huang Luo ◽

...

Keyword(s):

Magnetron Sputtering ◽

Tribological Properties ◽

Composite Films ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Mechanical And Tribological Properties

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Microstructure, mechanical and tribological properties of VCN-Ag composite films by reactive magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2020.126167 ◽

2020 ◽

Vol 399 ◽

pp. 126167

Author(s):

Dian Yu ◽

Lihua Yu ◽

Isaac Asempah ◽

Hongbo Ju ◽

Junhua Xu ◽

...

Keyword(s):

Magnetron Sputtering ◽

Tribological Properties ◽

Composite Films ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Mechanical And Tribological Properties

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In situ scanning tunneling microscopy studies of the evolution of surface morphology and microstructure in epitaxial TiN(001) grown by ultra-high-vacuum reactive magnetron sputtering

Surface and Coatings Technology ◽

10.1016/s0257-8972(97)00444-1 ◽

1997 ◽

Vol 94-95 ◽

pp. 403-408 ◽

Author(s):

Brian W. Karr ◽

I. Petrov ◽

P. Desjardins ◽

David G. Cahill ◽

J.E. Greene

Keyword(s):

Surface Morphology ◽

Magnetron Sputtering ◽

Scanning Tunneling Microscopy ◽

High Vacuum ◽

Reactive Magnetron Sputtering ◽

Ultra High Vacuum ◽

Scanning Tunneling ◽

Reactive Magnetron ◽

Tunneling Microscopy

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Mechanical and tribological properties of CNx films deposited by reactive magnetron sputtering

Wear ◽

10.1016/s0043-1648(00)00519-6 ◽

2001 ◽

Vol 248 (1-2) ◽

pp. 55-64 ◽

Author(s):

E. Broitman ◽

N. Hellgren ◽

O. Wänstrand ◽

M.P. Johansson ◽

T. Berlind ◽

...

Keyword(s):

Magnetron Sputtering ◽

Tribological Properties ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Mechanical And Tribological Properties ◽

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Substrate bias effects on mechanical and tribological properties of substitutional solid solution (Ti, Al)N films prepared by reactive magnetron sputtering

Materials Science and Engineering B ◽

10.1016/j.mseb.2006.03.036 ◽

2006 ◽

Vol 131 (1-3) ◽

pp. 62-71 ◽

Author(s):

K. Chu ◽

P.W. Shum ◽

Y.G. Shen

Keyword(s):

Solid Solution ◽

Magnetron Sputtering ◽

Tribological Properties ◽

Substitutional Solid Solution ◽

Reactive Magnetron Sputtering ◽

Substrate Bias ◽

Reactive Magnetron ◽

Mechanical And Tribological Properties

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Structure, mechanical and tribological properties of HfCx films deposited by reactive magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2014.11.130 ◽

2015 ◽

Vol 327 ◽

pp. 68-76 ◽

Author(s):

Wang Shuo ◽

Zhang Kan ◽

An Tao ◽

Hu Chaoquan ◽

Meng Qingnan ◽

...

Keyword(s):

Magnetron Sputtering ◽

Tribological Properties ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Mechanical And Tribological Properties

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The role of copper incorporation on the microstructure, mechanical and tribological properties of TiBN-Cu films by reactive magnetron sputtering

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2019.06.053 ◽

2019 ◽

Vol 801 ◽

pp. 112-122 ◽

Author(s):

Isaac Asempah ◽

Junhua Xu ◽

Lihua Yu ◽

Huang Luo ◽

JinLin Liu ◽

...

Keyword(s):

Magnetron Sputtering ◽

Tribological Properties ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Cu Films ◽

Mechanical And Tribological Properties ◽

Copper Incorporation

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Mechanical and tribological properties of CrTiCu(B,N) glassy-metal coatings deposited by reactive magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2005.04.009 ◽

2006 ◽

Vol 200 (14-15) ◽

pp. 4601-4611 ◽

Author(s):

C. Tsotsos ◽

K. Kanakis ◽

A. Davison ◽

M.A. Baker ◽

A. Matthews ◽

...

Keyword(s):

Magnetron Sputtering ◽

Tribological Properties ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Metal Coatings ◽

Mechanical And Tribological Properties

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Microstructures, mechanical and tribological properties of NbN/MoS2 nanomultilayered films deposited by reactive magnetron sputtering

Vacuum ◽

10.1016/j.vacuum.2018.11.038 ◽

2019 ◽

Vol 160 ◽

pp. 205-209 ◽

Author(s):

Ergeng Zhang ◽

Jingjing Liu ◽

Wei Li

Keyword(s):

Magnetron Sputtering ◽

Tribological Properties ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Mechanical And Tribological Properties

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Microstructure, oxidation resistance, mechanical and tribological properties of Mo–Al–N films by reactive magnetron sputtering

Vacuum ◽

10.1016/j.vacuum.2013.11.013 ◽

2014 ◽

Vol 103 ◽

pp. 21-27 ◽

Author(s):

Junhua Xu ◽

Hongbo Ju ◽

Lihua Yu

Keyword(s):

Magnetron Sputtering ◽

Oxidation Resistance ◽

Tribological Properties ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Mechanical And Tribological Properties

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