scholarly journals Characterization of TiN, CrN and (Ti, Cr) N Coatings Deposited by Cathodic ARC Evaporation

2014 ◽  
Vol 27 (7 (A)) ◽  
Keyword(s):  
Cathodic Arc Evaporation ◽  
Arc Evaporation ◽  
Cathodic Arc

scholarly journals The Role of Substrate Temperature and Magnetic Filtering for DLC by Cathodic Arc Evaporation

Coatings ◽  
2019 ◽  
Vol 9 (5) ◽  
pp. 345 ◽  
Author(s):  
Helge Lux ◽  
Matthias Edling ◽  
Massimiliano Lucci ◽  
Julia Kitzmann ◽  
Claus Villringer ◽  
...  
Keyword(s):  
Substrate Temperature ◽  
Plasma Source ◽  
Hard Carbon ◽  
Carbon Coatings ◽  
Different Types ◽  
Cathodic Arc Evaporation ◽  
Arc Evaporation ◽  
Cathodic Arc

Diamond-like carbon (DLC) films were deposited using two different types of high current arc evaporation. The first process used a magnetic particle filter to remove droplets from the plasma. For the second process, the samples were put into a metallic cage which was placed directly above the plasma source. For both processes, we varied the substrate temperature from 21 to 350 °C in order to investigate the temperature effect. The samples were characterized using SEM, AFM, XPS, Raman Spectroscopy, Ellipsometry, Photometry, and Nano Indentation in order to compare both methods of deposition and provide a careful characterization of such DLC films. We found that the sp3 content and the hardness can be precisely adjusted by changing the substrate temperature. Furthermore, in the case of unfiltered deposition, the optical constants can be shifted in the direction of higher absorbance in order to produce black and hard carbon coatings.

scholarly journals Detailed characterization of the Ti-O based thin films obtained by cathodic arc evaporation

2021 ◽  
Vol 62 (1) ◽  
pp. 41-50
Author(s):  
Vukoman Jokanović ◽  
Nenad Bundaleski ◽  
Božana Čolović ◽  
Manuela Ferarra ◽  
Bojan Jokanović ◽  
...  
Keyword(s):  
Thin Films ◽  
Titanium Oxides ◽  
Xps Analysis ◽  
Detailed Characterization ◽  
Extinction Coefficients ◽  
Cathodic Arc Evaporation ◽  
Arc Evaporation ◽  
Cathodic Arc ◽  
Oxidative State

Physicochemical properties of thin films on the base of titanium oxides, obtained by a cathodic arc evaporation on the surface of glass substrate are analysed in details. The analysis of these films was made by using XRD, FTIR, SEM, XPS analysis and ellipsometry. On the basis of these analyses, particularly analysis obtained by XPS, the oxidative state Ti and corresponding phases are determined through various film layers from the surface to the substrate. The depth of the various levels and their extinction coefficients and refractory indexes are estimated by ellipsometry.

Synthesis and characterization of superalloy coatings by cathodic arc evaporation

2017 ◽  
Vol 327 ◽  
pp. 139-145 ◽  
Author(s):  
J. Ast ◽  
M. Döbeli ◽  
A. Dommann ◽  
M. Gindrat ◽  
X. Maeder ◽  
...  
Keyword(s):  
Synthesis And Characterization ◽  
Cathodic Arc Evaporation ◽  
Arc Evaporation ◽  
Cathodic Arc

scholarly journals Characterization of worn Ti–Si cathodes used for reactive cathodic arc evaporation

2010 ◽  
Vol 28 (2) ◽  
pp. 347-353 ◽  
Author(s):  
J. Q. Zhu ◽  
A. Eriksson ◽  
N. Ghafoor ◽  
M. P. Johansson ◽  
J. Sjölén ◽  
...  
Keyword(s):  
Cathodic Arc Evaporation ◽  
Arc Evaporation ◽  
Cathodic Arc

Formation and characterization of DLC:Cr:Cu multi-layers coating using cathodic arc evaporation

2009 ◽  
Vol 18 (2-3) ◽  
pp. 368-373 ◽  
Author(s):  
Jui Yun Jao ◽  
Sheng Han ◽  
Li Shen Chang ◽  
Ya-Chi Chen ◽  
Chi-Lung Chang ◽  
...  
Keyword(s):  
Cathodic Arc Evaporation ◽  
Arc Evaporation ◽  
Cathodic Arc

Surface modification of Ti–Al targets during cathodic arc evaporation

2011 ◽  
Vol 205 (21-22) ◽  
pp. 5116-5123 ◽  
Author(s):  
David Rafaja ◽  
Conrad Polzer ◽  
Gerhard Schreiber ◽  
Peter Polcik ◽  
Martin Kathrein
Keyword(s):  
Surface Modification ◽  
Cathodic Arc Evaporation ◽  
Arc Evaporation ◽  
Cathodic Arc
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