Gas Cluster Ion Beam Etching under Acetic Acid Vapor for Etch-Resistant Material

2013 ◽  
Vol 52 (5S2) ◽  
pp. 05EB05 ◽  
Author(s):  
Akira Yamaguchi ◽  
Ryo Hinoura ◽  
Noriaki Toyoda ◽  
Ken-ichi Hara ◽  
Isao Yamada
Keyword(s):  
Acetic Acid ◽  
Ion Beam ◽  
Resistant Material ◽  
Ion Beam Etching ◽  
Acid Vapor ◽  
Cluster Ion ◽  
Gas Cluster Ion Beam

Atomic level smoothing of CVD diamond films by gas cluster ion beam etching

1996 ◽  
pp. 248-251
Author(s):  
Akihisa Yoshida ◽  
Masahiro Deguchi ◽  
Makoto Kitabatake ◽  
Takashi Hirao ◽  
Jiro Matsuo ◽  
...  
Keyword(s):  
Ion Beam ◽  
Diamond Films ◽  
Cvd Diamond ◽  
Atomic Level ◽  
Ion Beam Etching ◽  
Cluster Ion ◽  
Gas Cluster Ion Beam

Observing the evolution of regular nanostructured indium phosphide after gas cluster ion beam etching

2018 ◽  
Vol 459 ◽  
pp. 678-685 ◽  
Author(s):  
Anders J. Barlow ◽  
Naoko Sano ◽  
Billy J. Murdoch ◽  
Jose F. Portoles ◽  
Paul J. Pigram ◽  
...  
Keyword(s):  
Indium Phosphide ◽  
Ion Beam ◽  
Ion Beam Etching ◽  
Cluster Ion ◽  
Gas Cluster Ion Beam

Atomic level smoothing of CVD diamond films by gas cluster ion beam etching

1996 ◽  
Vol 112 (1-4) ◽  
pp. 248-251 ◽  
Author(s):  
Akihisa Yoshida ◽  
Masahiro Deguchi ◽  
Makoto Kitabatake ◽  
Takashi Hirao ◽  
Jiro Matsuo ◽  
...  
Keyword(s):  
Ion Beam ◽  
Diamond Films ◽  
Cvd Diamond ◽  
Atomic Level ◽  
Ion Beam Etching ◽  
Cluster Ion ◽  
Gas Cluster Ion Beam

scholarly journals Decontamination of geological samples by gas cluster ion beam etching or ultra violet/ozone

2017 ◽  
Vol 466 ◽  
pp. 256-262 ◽  
Author(s):  
Graham Purvis ◽  
Neil Gray ◽  
Naoko Sano ◽  
Anders Barlow ◽  
Charles Cockell ◽  
...  
Keyword(s):  
Ion Beam ◽  
Ultra Violet ◽  
Geological Samples ◽  
Ion Beam Etching ◽  
Cluster Ion ◽  
Gas Cluster Ion Beam

In situ X-ray photoelectron spectroscopy study of gas cluster ion beam etching of FeCo film

2014 ◽  
Vol 53 (3S2) ◽  
pp. 03DD05 ◽  
Author(s):  
Ryo Hinoura ◽  
Akira Yamaguchi ◽  
Noriaki Toyoda ◽  
Ken-ichi Hara ◽  
Isao Yamada
Keyword(s):  
Photoelectron Spectroscopy ◽  
Ion Beam ◽  
Spectroscopy Study ◽  
Ion Beam Etching ◽  
X Ray ◽  
Cluster Ion ◽  
Gas Cluster Ion Beam

Gas cluster ion beam processing equipment

2002 ◽  
Author(s):  
J. Bachand ◽  
A. Freytsis ◽  
E. Harrington ◽  
M. Gwinn ◽  
N. Hofmeester ◽  
...  
Keyword(s):  
Ion Beam ◽  
Processing Equipment ◽  
Cluster Ion ◽  
Gas Cluster Ion Beam

Gas Cluster Ion Beam Processing for Si Photonics

2007 ◽  
Author(s):  
N. Toyoda ◽  
l. Yamada ◽  
S. Akiyama ◽  
L.C. Kimerling ◽  
Y. Ishikawa ◽  
...  
Keyword(s):  
Ion Beam ◽  
Si Photonics ◽  
Cluster Ion ◽  
Gas Cluster Ion Beam

Development of Cu Etching Using O$_{2}$ Cluster Ion Beam under Acetic Acid Gas Atmosphere

2012 ◽  
Vol 51 ◽  
pp. 08HA02 ◽  
Author(s):  
Takanori Suda ◽  
Noriaki Toyoda ◽  
Ken-ichi Hara ◽  
Isao Yamada
Keyword(s):  
Acetic Acid ◽  
Ion Beam ◽  
Acid Gas ◽  
Gas Atmosphere ◽  
Cluster Ion

Ar gas cluster ion beam assisted XPS study of LiNbO3 Z cut surface

2021 ◽  
pp. 101428
Author(s):  
E.A. Skryleva ◽  
B.R. Senatulin ◽  
D.A. Kiselev ◽  
T.S. Ilina ◽  
D.A. Podgorny ◽  
...  
Keyword(s):  
Ion Beam ◽  
Cluster Ion ◽  
Gas Cluster Ion Beam ◽  
Ar Gas ◽  
Xps Study ◽  
Cut Surface
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