gas cluster ion beam
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scholarly journals Characteristics of a mixed-gas cluster ion beam for time-of-flight secondary ion mass spectrometry

2022 ◽  
Vol 572 ◽  
pp. 151467
Author(s):  
Sang Ju Lee ◽  
Aram Hong ◽  
Jinwan Cho ◽  
Chang Min Choi ◽  
Ji Young Baek ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Ion Beam ◽  
Time Of Flight ◽  
Mixed Gas ◽  
Ion Mass Spectrometry ◽  
Cluster Ion ◽  
Gas Cluster Ion Beam ◽  
Secondary Ion

Ar gas cluster ion beam assisted XPS study of LiNbO3 Z cut surface

2021 ◽  
pp. 101428
Author(s):  
E.A. Skryleva ◽  
B.R. Senatulin ◽  
D.A. Kiselev ◽  
T.S. Ilina ◽  
D.A. Podgorny ◽  
...  
Keyword(s):  
Ion Beam ◽  
Cluster Ion ◽  
Gas Cluster Ion Beam ◽  
Ar Gas ◽  
Xps Study ◽  
Cut Surface

Gas Cluster Ion Beam Cleaning of CVD-Grown Graphene for Use in Electronic Device Fabrication

2021 ◽  
Author(s):  
Barry Brennan ◽  
Alba Centeno ◽  
Amaia Zurutuza ◽  
Paul Mack ◽  
Keith R. Paton ◽  
...  
Keyword(s):  
Electronic Device ◽  
Ion Beam ◽  
Device Fabrication ◽  
Cluster Ion ◽  
Grown Graphene ◽  
Gas Cluster Ion Beam ◽  
Electronic Device Fabrication

scholarly journals Elastic modulus measurement of ultrathin layer using gas cluster ion beam

2021 ◽  
Vol 15 (6) ◽  
pp. JAMDSM0076-JAMDSM0076
Author(s):  
Hiroshi TANI ◽  
Renguo LU ◽  
Shinji KOGANEZAWA ◽  
Norio TAGAWA
Keyword(s):  
Elastic Modulus ◽  
Ion Beam ◽  
Cluster Ion ◽  
Modulus Measurement ◽  
Gas Cluster Ion Beam ◽  
Ultrathin Layer
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