etch bias
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Impact of Rework Process to ETCH Bias and the Corresponding Solution

2020 ◽  
Author(s):  
Pengkai Xu ◽  
Penggang Han ◽  
Wenyan Sun ◽  
Sen Wu ◽  
Bin Zhao ◽  
...  
Keyword(s):  
Etch Bias ◽  
Rework Process

Machine Learning Models for Edge Placement Error Based Etch Bias

2020 ◽  
pp. 1-1
Author(s):  
Yang Meng ◽  
Young-Chang Kim ◽  
Shujie Guo ◽  
Zhongli Shu ◽  
Yingchun Zhang ◽  
...  
Keyword(s):  
Machine Learning ◽  
Learning Models ◽  
Etch Bias ◽  
Machine Learning Models

Etch bias inversion during EUV mask ARC etch

2017 ◽  
Author(s):  
Alexander Lajn ◽  
Haiko Rolff ◽  
Richard Wistrom
Keyword(s):  
Etch Bias

Line end shortening and iso-dense etch bias improvement by ALD spacer shrink process

2017 ◽  
Author(s):  
Rui Chen ◽  
Granger Lobb ◽  
Aleksandra Clancy ◽  
Bradley Morgenfeld ◽  
Shyam Pal
Keyword(s):  
Etch Bias

Accurate characterization of 2D etch bias by capturing surrounding effects from resist and trench areas

2017 ◽  
Author(s):  
Yongfa Fan ◽  
Leiwu Zheng ◽  
Mu Feng ◽  
Jinze Wang ◽  
Qiao Zhao ◽  
...  
Keyword(s):  
Etch Bias

Multi-layer model vs. single-layer model for N and P doped poly layers in etch bias modeling

2010 ◽  
Author(s):  
Jianliang Li ◽  
Ezequiel Vidal-Russell ◽  
Daniel Beale ◽  
Chunqing Wang ◽  
Lawrence S. Melvin III
Keyword(s):  
Single Layer ◽  
Layer Model ◽  
Etch Bias ◽  
Single Layer Model
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