Large plasmonic color metasurfaces fabricated by super resolution deep UV lithography
A novel super resolution deep UV lithography method is employed to fabricate large area plasmonic metasurfaces.
2011 ◽
Vol 10
(6)
◽
pp. 1214-1216
◽
Keyword(s):
1989 ◽
pp. 115-132
◽
1983 ◽
pp. 397-410
1987 ◽