dual damascene
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Exploring W-Cu hybrid dual damascene metallization for future nodes

2021 ◽  
Author(s):  
Marleen H. van der Veen ◽  
O. Varela Pedreira ◽  
N. Heylen ◽  
N. Jourdan ◽  
S. Lariviere ◽  
...  
Keyword(s):  
Dual Damascene

Marangoni effect-based under-layer for a Dual Damascene via-first approach: a scalable solution to the unwanted photoresist swing effect

2020 ◽  
Author(s):  
Valentina Dall'Asta ◽  
Emma Litterio ◽  
Nicoletta Corneo ◽  
Jakub Koza ◽  
Jonathan Jeauneau ◽  
...  
Keyword(s):  
Marangoni Effect ◽  
Dual Damascene

Analysis of Electromigration in Dual-Damascene Interconnect Structures

2019 ◽  
Vol 14 (1) ◽  
pp. 337-348
Author(s):  
Roberto Lacerda de Orio ◽  
Sara Carniello ◽  
Hajdin Ceric ◽  
Siegfried Selberherr
Keyword(s):  
Dual Damascene

Novel Hardmask for Sub-20nm Copper/Low K Backend Dual Damascene Integration

2019 ◽  
Vol 35 (4) ◽  
pp. 651-665 ◽  
Author(s):  
Li-Qun Xia ◽  
Zhenjiang Cui ◽  
Mihaela Balseanu ◽  
Victor Nguyen ◽  
Kevin Zhou ◽  
...  
Keyword(s):  
Dual Damascene ◽  
Low K

The Influence of The SIN Cap Process on The Voltage Breakdown and Electromigration Performance of Dual Damascene Cu Interconnects

2019 ◽  
Vol 34 (1) ◽  
pp. 787-792
Author(s):  
Ya-Lu Cao ◽  
Charles Xing ◽  
Neil Xu ◽  
Hua Zhou ◽  
Allen Bian ◽  
...  
Keyword(s):  
Cu Interconnects ◽  
Dual Damascene ◽  
Voltage Breakdown
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