cu interconnects
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Nanostructuring enforced sandwich-tubular CNT-Cu interconnects

2021 ◽  
Vol 278 ◽  
pp. 114705
Author(s):  
Pengjie Wang ◽  
Qiang Cao ◽  
Yucheng Lan ◽  
Hanxing Zhu ◽  
Sheng Liu ◽  
...  
Keyword(s):  
Cu Interconnects

Electrodeposition of Cu(111) onto a Ru(0001) seed layer for epitaxial Cu interconnects

2021 ◽  
Vol 130 (13) ◽  
pp. 135301
Author(s):  
Ryan R. Gusley ◽  
Quintin Cumston ◽  
Kevin R. Coffey ◽  
Alan C. West ◽  
Katayun Barmak
Keyword(s):  
Seed Layer ◽  
Cu Interconnects

Atomic Layer Deposition of Ru for Replacing Cu-Interconnects

2021 ◽  
Author(s):  
Yohei Kotsugi ◽  
Seung-Min Han ◽  
Youn-Hye Kim ◽  
Taehoon Cheon ◽  
Dip K. Nandi ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Cu Interconnects ◽  
Layer Deposition

Selective deposition of AlOx for Fully Aligned Via in nano Cu interconnects

2021 ◽  
Author(s):  
Son Van Nguyen ◽  
H. Shobha ◽  
C. B. Peethala ◽  
T. Haigh ◽  
H. Huang ◽  
...  
Keyword(s):  
Selective Deposition ◽  
Cu Interconnects

Pronounced electromigration of GaInSn/Cu interconnects under super low critical current density

2021 ◽  
pp. 130137
Author(s):  
Zhaoqing Gao ◽  
Chong Dong ◽  
Shengyan Shang ◽  
Mingliang Huang ◽  
Haitao Ma ◽  
...  
Keyword(s):  
Critical Current Density ◽  
Critical Current ◽  
Current Density ◽  
Cu Interconnects
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