ion projection lithography
Recently Published Documents

TOTAL DOCUMENTS

76
(FIVE YEARS 0)

H-INDEX

11
(FIVE YEARS 0)
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Recent Developments in Nanofabrication Using Ion Projection Lithography

Small ◽  
2005 ◽  
Vol 1 (6) ◽  
pp. 594-608 ◽  
Author(s):  
Ampere A. Tseng
Keyword(s):  
Projection Lithography ◽  
Recent Developments ◽  
Ion Projection Lithography

Thermal emissivity of carbon coated p-doped silicon stencil masks for ion projection lithography

2003 ◽  
Vol 21 (1) ◽  
pp. 123 ◽  
Author(s):  
D. Braun ◽  
R. Gajic ◽  
F. Kuchar ◽  
R. Korntner ◽  
E. Haugeneder ◽  
...  
Keyword(s):  
Thermal Emissivity ◽  
Projection Lithography ◽  
Doped Silicon ◽  
Carbon Coated ◽  
Ion Projection Lithography

Ion projection lithography (IPL): posters presented at the 5th Intrnational SEMATECH Next-Generation Lithography (NGL) workshop

2002 ◽  
Author(s):  
Rainer Kaesmaier ◽  
Hans Loeschner ◽  
Patrick W. de Jager ◽  
Albrecht Ehrmann ◽  
Stefan Hirscher ◽  
...  
Keyword(s):  
Next Generation ◽  
Projection Lithography ◽  
Ion Projection Lithography ◽  
Next Generation Lithography

Ion projection lithography below 70 nm: tool performance and resist process

2002 ◽  
Vol 61-62 ◽  
pp. 301-307 ◽  
Author(s):  
S. Hirscher ◽  
M. Kümmel ◽  
O. Kirch ◽  
W.-D. Domke ◽  
A. Wolter ◽  
...  
Keyword(s):  
Projection Lithography ◽  
Tool Performance ◽  
Ion Projection Lithography

Stability of DRAM-devices with respect to 75 keV helium ion beam irradiation as required for ion projection lithography of critical layers

2002 ◽  
Vol 61-62 ◽  
pp. 351-355 ◽  
Author(s):  
S. Hirscher ◽  
M. Kümmel ◽  
A. Wolter ◽  
R. Kaesmaier ◽  
A. Jaeschke
Keyword(s):  
Ion Beam ◽  
Beam Irradiation ◽  
Ion Beam Irradiation ◽  
Projection Lithography ◽  
Helium Ion ◽  
Critical Layers ◽  
Ion Projection Lithography

High precision stress measurement of ion projection lithography mask membranes

2002 ◽  
Vol 20 (6) ◽  
pp. 3095 ◽  
Author(s):  
José L. Torres ◽  
J. C. Wolfe ◽  
Paul Ruchhoeft ◽  
Timothy F. Kennedy ◽  
Joseph Podolski ◽  
...  
Keyword(s):  
High Precision ◽  
Stress Measurement ◽  
Projection Lithography ◽  
Ion Projection Lithography

Wafer stage assembly for ion projection lithography

2001 ◽  
Vol 57-58 ◽  
pp. 181-185 ◽  
Author(s):  
Christoph Damm ◽  
Thomas Peschel ◽  
Stephan Risse ◽  
Ulf C. Kirschstein
Keyword(s):  
Projection Lithography ◽  
Ion Projection Lithography

Reference plate manufacturing process for the ion projection lithography pattern lock system

2001 ◽  
Vol 57-58 ◽  
pp. 213-218
Author(s):  
F. Letzkus ◽  
J. Butschke ◽  
M. Irmscher ◽  
C. Reuter ◽  
R. Springer ◽  
...  
Keyword(s):  
Manufacturing Process ◽  
Projection Lithography ◽  
Ion Projection Lithography ◽  
Reference Plate

Adjustment and mounting of stencil masks for ion projection lithography

2001 ◽  
Vol 57-58 ◽  
pp. 187-190
Author(s):  
Christoph Damm ◽  
Andreas Gebhardt ◽  
Thomas Peschel, ◽  
Ulf C. Kirschstein
Keyword(s):  
Projection Lithography ◽  
Ion Projection Lithography

Resist process development for sub-100-nm ion projection lithography

2001 ◽  
Vol 57-58 ◽  
pp. 517-524 ◽  
Author(s):  
S Hirscher ◽  
R Kaesmaier ◽  
W.-D Domke ◽  
A Wolter ◽  
H Löschner ◽  
...  
Keyword(s):  
Process Development ◽  
Projection Lithography ◽  
Ion Projection Lithography
Load More ...
Sign in / Sign up

Export Citation Format

Share Document