Monte Carlo calculation of the energy parameters and spatial distribution of the cathodic arc ions while passing through the macro-particles filters

The flow, energy distribution and concentrations profiles of Ti ions in cathodic arc are studied by test particle Monte Carlo simulations with considering the mass transfer through the macro-particles filters with inhomogeneous magnetic field. The loss of ions due to their deposition on filter walls was calculated as a function of electric current and number of turns in the coil. The magnetic field concentrator that arises in the bending region of the filters leads to increase the loss of the ions component of cathodic arc. The ions loss up to 80 % of their energy resulted by the paired elastic collisions which correspond to the experimental results. The ion fluxes arriving at the surface of the substrates during planetary rotating of them opposite the evaporators mounted to each other at an angle of 120° characterized by the wide range of mutual overlapping.

Increase of Magnetic Sensitivity of Magnetically Controlled MEMS Switches

ABSTRACTThe paper presents the research results of influence of various parameters of magnetic field concentrator geometry on sensitivity of magnetically controlled MEMS switches. It is shown that magnetic sensitivity increases with the growth of the magnetic concentrator width and practically does not depend on its length. It is established that dependence of magnetic sensitivity on the overlap length of the ferromagnetic flexible contact-concentrator has a minimum corresponding to 2-3 lengths of the contact gap. Recommendations on sensitivity increase of magnetically controlled MEMS switches are provided.