Thin Film Processes
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Published By Elsevier

9780127282503

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Plasma-Assisted Etching Techniques for Pattern Delineation

Thin Film Processes ◽

10.1016/b978-0-12-728250-3.50016-7 ◽

1978 ◽

pp. 497-556 ◽

Author(s):

C.M. MELLIAR-SMITH ◽

C.J. MOGAB

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Chemical Vapor Deposition of Inorganic Thin Films

Thin Film Processes ◽

10.1016/b978-0-12-728250-3.50012-x ◽

1978 ◽

pp. 257-331 ◽

Author(s):

WERNER KERN ◽

VLADIMIR S. BAN

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Inorganic Thin Films

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Plasma Deposition of Inorganic Thin Films

Thin Film Processes ◽

10.1016/b978-0-12-728250-3.50013-1 ◽

1978 ◽

pp. 335-360 ◽

Author(s):

J.R. HOLLAHAN ◽

R.S. ROSLER

Keyword(s):

Plasma Deposition ◽

Inorganic Thin Films

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Planar Magnetron Sputtering

Thin Film Processes ◽

10.1016/b978-0-12-728250-3.50009-x ◽

1978 ◽

pp. 131-173 ◽

Author(s):

ROBERT K. WAITS

Keyword(s):

Magnetron Sputtering ◽

Planar Magnetron

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The Sputter and S-Gun Magnetrons

Thin Film Processes ◽

10.1016/b978-0-12-728250-3.50008-8 ◽

1978 ◽

pp. 115-129 ◽

Author(s):

DAVID B. FRASER

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Introduction

Thin Film Processes ◽

10.1016/b978-0-12-728250-3.50005-2 ◽

1978 ◽

pp. 3-7 ◽

Author(s):

J.L. VOSSEN

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Chemical Etching

Thin Film Processes ◽

10.1016/b978-0-12-728250-3.50015-5 ◽

1978 ◽

pp. 401-496 ◽

Author(s):

WERNER KERN ◽

CHERYL A DECKERT

Keyword(s):

Chemical Etching

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Glow Discharge Sputter Deposition

Thin Film Processes ◽

10.1016/b978-0-12-728250-3.50006-4 ◽

1978 ◽

pp. 11-73 ◽

Author(s):

J.L. VOSSEN ◽

J.J. CUOMO

Keyword(s):

Glow Discharge ◽

Sputter Deposition

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Index

Thin Film Processes ◽

10.1016/b978-0-12-728250-3.50017-9 ◽

1978 ◽

pp. 557-564

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Preface

Thin Film Processes ◽

10.1016/b978-0-12-728250-3.50004-0 ◽

1978 ◽

pp. xi

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