Silicon liquid flow sensor encapsulation using metal to glass anodic bonding

2004 ◽  
Author(s):  
D. Briand ◽  
P. Weber ◽  
N.F. de Rooij
Keyword(s):  
Liquid Flow ◽  
Flow Sensor ◽  
Anodic Bonding

Monolithic flow sensor for measuring millilitre per minute liquid flow

1992 ◽  
Vol 33 (3) ◽  
pp. 143-153 ◽  
Author(s):  
Canqian Yang ◽  
Henrik Søeberg
Keyword(s):  
Liquid Flow ◽  
Flow Sensor

Novel liquid flow sensor based on differential pressure method

2007 ◽  
Vol 78 (1) ◽  
pp. 015108 ◽  
Author(s):  
Zhizhuang Liu ◽  
Tiansheng Hong ◽  
Wenzhao Zhang ◽  
Zhen Li ◽  
Haibo Chen
Keyword(s):  
Liquid Flow ◽  
Differential Pressure ◽  
Flow Sensor ◽  
Pressure Method

Electrokinetic Liquid Flow Sensor

2014 ◽  
Vol 9 (4) ◽  
pp. 89-96
Author(s):  
Maxim Parashchenko ◽  
Nikolay Filippov ◽  
Viktor Kirienko ◽  
Sergey Romanov
Keyword(s):  
Liquid Flow ◽  
Operating Characteristic ◽  
Streaming Potential ◽  
Flow Sensor ◽  
Electric Response ◽  
Sensing Element ◽  
Electrokinetic Effect ◽  
Fabrication And Characterization ◽  
And Performance

This paper deals with fabrication and characterization of liquid flow sensor based on electrokinetic effect – streaming potential. The possibility of using silicon microchannel membrane as a sensing element of the sensor has been demonstrated. Electric response of the sensor has been determined by passing deionized water through the membrane. A linear dependence of the operating characteristic has been found. Sensitivity and performance of the electrokinetic device have been evaluated. The optimal design of the liquid flow sensor has been proposed

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