Handbook of Advanced Plasma Processing Techniques
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15

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3

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Published By Springer Berlin Heidelberg

9783642630965, 9783642569890

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Photomask Etching

Handbook of Advanced Plasma Processing Techniques ◽

10.1007/978-3-642-56989-0_9 ◽

2000 ◽

pp. 361-418 ◽

Author(s):

D. J. Resnick

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Plasma Reactor Modeling

Handbook of Advanced Plasma Processing Techniques ◽

10.1007/978-3-642-56989-0_4 ◽

2000 ◽

pp. 123-144 ◽

Author(s):

M. Meyyappan

Keyword(s):

Plasma Reactor ◽

Reactor Modeling

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Surface Damage Induced by Dry Etching

Handbook of Advanced Plasma Processing Techniques ◽

10.1007/978-3-642-56989-0_8 ◽

2000 ◽

pp. 309-360 ◽

Author(s):

S. W. Pang

Keyword(s):

Surface Damage ◽

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Mass Spectrometric Characterization of Plasma Etching Processes

Handbook of Advanced Plasma Processing Techniques ◽

10.1007/978-3-642-56989-0_6 ◽

2000 ◽

pp. 205-256 ◽

Author(s):

C. R. Eddy

Keyword(s):

Plasma Etching ◽

Mass Spectrometric

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Device Damage During Low Temperature High-Density Plasma Chemical Vapor Deposition

Handbook of Advanced Plasma Processing Techniques ◽

10.1007/978-3-642-56989-0_14 ◽

2000 ◽

pp. 575-605

Author(s):

J. Lee ◽

F. Ren

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

High Density ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

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Dry Etching of InP Vias

Handbook of Advanced Plasma Processing Techniques ◽

10.1007/978-3-642-56989-0_13 ◽

2000 ◽

pp. 549-573

Author(s):

S. Thomas ◽

J. J. Brown

Keyword(s):

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Bulk Si Micromachining for Integrated Microsystems and MEMS Processing

Handbook of Advanced Plasma Processing Techniques ◽

10.1007/978-3-642-56989-0_10 ◽

2000 ◽

pp. 419-458 ◽

Author(s):

R. J. Shul ◽

J. G. Fleming

Keyword(s):

Integrated Microsystems

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Plasma Fundamentals for Materials Processing

Handbook of Advanced Plasma Processing Techniques ◽

10.1007/978-3-642-56989-0_2 ◽

2000 ◽

pp. 33-68

Author(s):

J. E. Stevens

Keyword(s):

Materials Processing

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Ion Beam Etching of Compound Semiconductors

Handbook of Advanced Plasma Processing Techniques ◽

10.1007/978-3-642-56989-0_12 ◽

2000 ◽

pp. 507-547 ◽

Author(s):

G. A. Vawter

Keyword(s):

Ion Beam ◽

Compound Semiconductors ◽

Ion Beam Etching

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Fundamentals of Plasma Process-Induced Charging and Damage

Handbook of Advanced Plasma Processing Techniques ◽

10.1007/978-3-642-56989-0_7 ◽

2000 ◽

pp. 257-308 ◽

Author(s):

K. P. Giapis

Keyword(s):

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