2013 e-Manufacturing & Design Collaboration Symposium (eMDC)
Latest Publications

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33

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1

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Published By IEEE

9781479947096

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Bottleneck-centric pull and push allocation and sequencing of wet-bench and furnace tools

2013 e-Manufacturing & Design Collaboration Symposium (eMDC) ◽

10.1109/emdc.2013.6756048 ◽

2013 ◽

Author(s):

Yu-Ting Kao ◽

Shun-Cheng Zhan ◽

Shi-Chung Chang

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Study of water contamination for Thermal process system (TPS)

2013 e-Manufacturing & Design Collaboration Symposium (eMDC) ◽

10.1109/emdc.2013.6756040 ◽

2013 ◽

Author(s):

Tomohito Matsuo ◽

Yudo Sugawara ◽

Takashi Fuse ◽

Misako Saito

Keyword(s):

Water Contamination ◽

Thermal Process ◽

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Addressable test-chip compiler for test chip design automation and transistor/yield characterization

2013 e-Manufacturing & Design Collaboration Symposium (eMDC) ◽

10.1109/emdc.2013.6756041 ◽

2013 ◽

Author(s):

Weiwei Pan ◽

Xu Ouyang ◽

Yongjun Zheng ◽

Yongli Liu ◽

Zheng Shi ◽

...

Keyword(s):

Design Automation ◽

Test Chip ◽

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Methodology to review chamber type equipment performance

2013 e-Manufacturing & Design Collaboration Symposium (eMDC) ◽

10.1109/emdc.2013.6756042 ◽

2013 ◽

Author(s):

Leong Pei Shan ◽

Leong Kok Chee ◽

Sharon Su

Keyword(s):

Equipment Performance

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Penetration behavior of airborne particles into wafer environment

2013 e-Manufacturing & Design Collaboration Symposium (eMDC) ◽

10.1109/emdc.2013.6756055 ◽

2013 ◽

Author(s):

Masaki Hirano ◽

Yuichi Kuroda ◽

Tsunekazu Yasutake ◽

Yoko Iwakaji ◽

Makiko Tamaoki ◽

...

Keyword(s):

Airborne Particles ◽

Penetration Behavior

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Reliable screening for zero-defect quality improvement by temperature gradient testing

2013 e-Manufacturing & Design Collaboration Symposium (eMDC) ◽

10.1109/emdc.2013.6756043 ◽

2013 ◽

Author(s):

Q. Wang ◽

T. Kyuho ◽

H. Saihara ◽

T. Kitamura ◽

K. Yonemura ◽

...

Keyword(s):

Quality Improvement ◽

Temperature Gradient

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Simulation model and multi-criteria decision making for layout design of cellular manufacturing in a solar cell manufacturer

2013 e-Manufacturing & Design Collaboration Symposium (eMDC) ◽

10.1109/emdc.2013.6756039 ◽

2013 ◽

Author(s):

Wei-Yi Liu ◽

Chia-Yen Lee ◽

Taho Yang ◽

Jiunn-Chenn Lu

Keyword(s):

Decision Making ◽

Simulation Model ◽

Cellular Manufacturing ◽

Layout Design ◽

Multi Criteria Decision Making

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Holistic CD metrology for process control of directed self-assembly

2013 e-Manufacturing & Design Collaboration Symposium (eMDC) ◽

10.1109/emdc.2013.6756064 ◽

2013 ◽

Author(s):

Masafumi Asano ◽

Akiko Kawamoto ◽

Kazuto Matsuki

Keyword(s):

Process Control ◽

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Breakthrough of 6% people productivity improvement via the development of Cloud Monitor

2013 e-Manufacturing & Design Collaboration Symposium (eMDC) ◽

10.1109/emdc.2013.6756054 ◽

2013 ◽

Author(s):

Y.H. Chen ◽

C.J. Huang ◽

C.L. Wang

Keyword(s):

Productivity Improvement

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x-dimension of e-diagnosis loading for improve people productivity

2013 e-Manufacturing & Design Collaboration Symposium (eMDC) ◽

10.1109/emdc.2013.6756061 ◽

2013 ◽

Author(s):

Hong Kai Lin ◽

S.H. Chiu ◽

Jung Pin Hsu ◽

Che Yu Chiu

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