2005 13th International Conference on Advanced Thermal Processing of Semiconductors
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Superior Spike Annealing Performance in 65nm Source/Drain Extension Engineering

2006 ◽  
Author(s):  
C.I. Li ◽  
Chin Cheng Chien ◽  
K.T. Huang ◽  
Po Yuan Chen ◽  
Hsiang Ying Wang ◽  
...  
Keyword(s):  
Spike Annealing

Ni>inf<2>/inf<Si and NiSi Formation by Low Temperature Soak and Spike RTPs

2006 ◽  
Author(s):  
Eun-Ha Kim ◽  
H. Forstner ◽  
M. Foad ◽  
N. Tam ◽  
S. Ramamurthy ◽  
...  
Keyword(s):  
Low Temperature

Physical Aspects of Particle Deposition in RTP

2006 ◽  
Author(s):  
P. Schmid ◽  
S. Frigge ◽  
Th. Huelsmann ◽  
B. Nadig ◽  
Z. Nenyei ◽  
...  
Keyword(s):  
Particle Deposition
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