Handbook of Thin Film Deposition
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Published By Elsevier

9780128123119
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Limits of Gate Dielectrics Scaling

2018 ◽  
pp. 107-145 ◽  
Author(s):  
Shahab Siddiqui ◽  
Takashi Ando ◽  
Rajan K. Pandey ◽  
Dominic Schepis
Keyword(s):  
Gate Dielectrics

List of Contributors

2018 ◽  
pp. xv-xvi
Author(s):  
Takashi Ando ◽  
Michael Belyansky ◽  
Elham R. Borujeny ◽  
Ken Cadien ◽  
Kenneth C. Cadien ◽  
...  

Atomic Layer Deposition

2018 ◽  
pp. 359-377 ◽  
Author(s):  
Triratna Muneshwar ◽  
Mengmeng Miao ◽  
Elham R. Borujeny ◽  
Ken Cadien
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition

Summing Up

2018 ◽  
pp. 103
Author(s):  
Krishna Seshan ◽  
Dominic Schepis

Thermal Engineering at the Limits of the CMOS Era

2018 ◽  
pp. 63-101 ◽  
Author(s):  
Krishna V. Valavala ◽  
Keith D. Coulson ◽  
Manjunath C. Rajagopal ◽  
Dhruv Gelda ◽  
Sanjiv Sinha
Keyword(s):  
Thermal Engineering
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