Society of Vacuum Coaters 57th (2014) Annual Technical Conference Proceedings
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Published By Society Of Vacuum Coaters

9781878068347

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Low Temperature Synthesis of Silicon Nitride Thin Film by UHFAssisted RF PECVD

Society of Vacuum Coaters 57th (2014) Annual Technical Conference Proceedings ◽

10.14332/svc14.proc.1811 ◽

2014 ◽

Author(s):

K.S. Shin ◽

B.B. Sahu ◽

J.S. Lee ◽

K. Takeda ◽

M. Hori ◽

...

Keyword(s):

Thin Film ◽

Silicon Nitride ◽

Low Temperature ◽

Low Temperature Synthesis ◽

Temperature Synthesis

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2D PIC-MC Simulation of Reactive Dual Magnetron Discharges on TiO2

Society of Vacuum Coaters 57th (2014) Annual Technical Conference Proceedings ◽

10.14332/svc14.proc.1874 ◽

2014 ◽

Author(s):

T. Melzig ◽

M. Siemers ◽

A. Pflug

Keyword(s):

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A MF-AC Plasma Enhanced CVD Technology for High Rate Deposition of DLC

Society of Vacuum Coaters 57th (2014) Annual Technical Conference Proceedings ◽

10.14332/svc14.proc.1867 ◽

2014 ◽

Author(s):

H. Tamagaki ◽

J. Haga ◽

H. Ito ◽

A. Umeda

Keyword(s):

High Rate ◽

Plasma Enhanced Cvd

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Substrates Prepared by Reactive DC Magnetron Sputtering

Society of Vacuum Coaters 57th (2014) Annual Technical Conference Proceedings ◽

10.14332/svc14.proc.1848 ◽

2014 ◽

Author(s):

K. Udaykumar ◽

D.S. Murali ◽

M.K. Jain ◽

A. Subrahmanyam

Keyword(s):

Magnetron Sputtering ◽

Dc Magnetron Sputtering

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Silicon Thin Film Anodes Coated on Micron Carbon-Fiber Current Collectors for Lithium Ion Batteries

Society of Vacuum Coaters 57th (2014) Annual Technical Conference Proceedings ◽

10.14332/svc14.proc.1846 ◽

2014 ◽

Author(s):

K.-F. Chiu ◽

S.-H. Su ◽

H.-J. Leu ◽

C.-Y. Wu

Keyword(s):

Thin Film ◽

Carbon Fiber ◽

Lithium Ion Batteries ◽

Lithium Ion ◽

Silicon Thin Film ◽

Current Collectors

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Ultra High Barrier Coatings by PECVD

Society of Vacuum Coaters 57th (2014) Annual Technical Conference Proceedings ◽

10.14332/svc14.proc.1844 ◽

2014 ◽

Author(s):

J. Madocks ◽

P. Ngo

Keyword(s):

Barrier Coatings

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Evaluation of Broadband Optical Monitoring for Optical Interference Coatings

Society of Vacuum Coaters 57th (2014) Annual Technical Conference Proceedings ◽

10.14332/svc14.proc.1837 ◽

2014 ◽

Author(s):

D. Deakins ◽

T. Ramin ◽

B. Rubin ◽

S. Chakmakjian

Keyword(s):

Optical Monitoring ◽

Optical Interference

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Time for Lean PVD

Society of Vacuum Coaters 57th (2014) Annual Technical Conference Proceedings ◽

10.14332/svc14.proc.1835 ◽

2014 ◽

Author(s):

P. Högfeldt ◽

T. Rosell ◽

H. Ljungcrantz

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Open Drift Path Magnetron Cathodes

Society of Vacuum Coaters 57th (2014) Annual Technical Conference Proceedings ◽

10.14332/svc14.proc.1829 ◽

2014 ◽

Author(s):

D. Glocker ◽

M.M. Romach

Keyword(s):

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Development of Titanium Nitride Fractal Coatings for Cardiac and Neural Electrostimulation Electrodes

Society of Vacuum Coaters 57th (2014) Annual Technical Conference Proceedings ◽

10.14332/svc14.proc.1819 ◽

2014 ◽

Author(s):

C. Outen ◽

D.W. Konopka ◽

T.F. Fennessey

Keyword(s):

Titanium Nitride

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