Low Temperature Synthesis of Silicon Nitride Thin Film by UHFAssisted RF PECVD

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ChemPlusChem ◽  
2020 ◽  
Vol 85 (4) ◽  
pp. 634-640
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S. Haller ◽  
D. Giaume ◽  
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1975 ◽  
Vol 14 (2) ◽  
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Yoichi Oyama ◽  
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2002 ◽  
Vol 110 (1286) ◽  
pp. 911-915 ◽  
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Ayako NISHIKATA ◽  
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Mikio KONNO ◽  
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2015 ◽  
Vol 632 ◽  
pp. 723-728 ◽  
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Saima Mushtaq ◽  
Bushra Ismail ◽  
Misbah Aurang Zeb ◽  
N.J. Suthan Kissinger ◽  
Aurang Zeb

2003 ◽  
Vol 240-242 ◽  
pp. 537-540 ◽  
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