Low Temperature Synthesis of Silicon Nitride Thin Film by UHFAssisted RF PECVD
Keyword(s):
2006 ◽
Vol 38
(1)
◽
pp. 47-53
◽
Keyword(s):
2018 ◽
Vol 10
(13)
◽
pp. 11008-11017
◽
Keyword(s):
1975 ◽
Vol 14
(2)
◽
pp. 301-302
◽
Keyword(s):
2002 ◽
Vol 110
(1286)
◽
pp. 911-915
◽
Keyword(s):
2016 ◽
Vol 25
(1)
◽
pp. 015017
◽
2016 ◽
Vol 16
(2)
◽
pp. 1934-1937
◽
2015 ◽
Vol 632
◽
pp. 723-728
◽
2003 ◽
Vol 240-242
◽
pp. 537-540
◽