ACS Symposium Series - Integrated Circuits: Chemical and Physical Processing
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20

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2

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Published By American Chemical Society

0841209405, 0841211221

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Vapor-Phase Epitaxy of Group III-V Compound Optoelectronic Devices

ACS Symposium Series - Integrated Circuits: Chemical and Physical Processing ◽

10.1021/bk-1985-0290.ch012 ◽

1985 ◽

pp. 221-240 ◽

Author(s):

G. H. Olsen

Keyword(s):

Vapor Phase ◽

Optoelectronic Devices ◽

Vapor Phase Epitaxy ◽

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Subject Index

ACS Symposium Series - Integrated Circuits: Chemical and Physical Processing ◽

10.1021/bk-1985-0290.ix002 ◽

1985 ◽

pp. 335-348

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Author Index

ACS Symposium Series - Integrated Circuits: Chemical and Physical Processing ◽

10.1021/bk-1985-0290.ix001 ◽

1985 ◽

pp. 335-335

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Advanced Device Isolation for Very Large Scale Integration

ACS Symposium Series - Integrated Circuits: Chemical and Physical Processing ◽

10.1021/bk-1985-0290.ch013 ◽

1985 ◽

pp. 241-275 ◽

Author(s):

H. B. Pogge

Keyword(s):

Large Scale ◽

Very Large Scale Integration ◽

Large Scale Integration ◽

Scale Integration

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Solid-Liquid Equilibrium in Ternary Group III-V Semiconductor Materials

ACS Symposium Series - Integrated Circuits: Chemical and Physical Processing ◽

10.1021/bk-1985-0290.ch014 ◽

1985 ◽

pp. 276-296 ◽

Author(s):

T. L. Aselage ◽

K. M. Chang ◽

T. J. Anderson

Keyword(s):

Semiconductor Materials ◽

Liquid Equilibrium ◽

Group Iii ◽

Group Iii V Semiconductor ◽

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Convective Diffusion in Zone Refining of Low Prandtl Number Liquid Metals and Semiconductors

ACS Symposium Series - Integrated Circuits: Chemical and Physical Processing ◽

10.1021/bk-1985-0290.ch004 ◽

1985 ◽

pp. 47-69

Author(s):

William N. Gill ◽

Nicholas D. Kazarinoff ◽

John D. Verhoeven

Keyword(s):

Prandtl Number ◽

Convective Diffusion ◽

Liquid Metals ◽

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Conservation Laws for Mass, Momentum, and Energy

ACS Symposium Series - Integrated Circuits: Chemical and Physical Processing ◽

10.1021/bk-1985-0290.ch002 ◽

1985 ◽

pp. 12-30

Author(s):

Bill Baerg

Keyword(s):

Conservation Laws

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Research Opportunities in Resist Technology

ACS Symposium Series - Integrated Circuits: Chemical and Physical Processing ◽

10.1021/bk-1985-0290.ch005 ◽

1985 ◽

pp. 70-94

Author(s):

David S. Soong

Keyword(s):

Research Opportunities

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Wafer Design and Characterization for Integrated-Circuit Processes

ACS Symposium Series - Integrated Circuits: Chemical and Physical Processing ◽

10.1021/bk-1985-0290.ch016 ◽

1985 ◽

pp. 310-333

Author(s):

R. Schindler ◽

D. Huber ◽

J. Reffle

Keyword(s):

Integrated Circuit

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Plasma-Assisted Processing

ACS Symposium Series - Integrated Circuits: Chemical and Physical Processing ◽

10.1021/bk-1985-0290.ch010 ◽

1985 ◽

pp. 164-177 ◽

Author(s):

Herbert H. Sawin ◽

Albert D. Richards ◽

Brian E. Thompson

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