1994 Solid-State, Actuators, and Microsystems Workshop Technical Digest
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MICROMACHINED JETS FOR MANIPULATION OF MACRO FLOWS

1994 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1994.55 ◽

1994 ◽

Author(s):

D.J. Coe ◽

M.A. Trautman ◽

A. Glezer ◽

M.G. Allen

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A MICROMACHINED VIBRATING RING GYROSCOPE

1994 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1994.49 ◽

1994 ◽

Author(s):

M.W. Putty ◽

K. Najafi

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USES OF ELECTROPLATED ALUMINUM IN MICROMACHINING APPLICATIONS

1994 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1994.21 ◽

1994 ◽

Author(s):

A.B. Frazier ◽

M.G. Allen

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SURFACE MICROMACHINED MULTIPLE LEVEL TUNGSTEN MICROACTUATORS

1994 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1994.23 ◽

1994 ◽

Author(s):

L.-Y. Chen ◽

N.C. MacDonald

Keyword(s):

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STUDIES ON THE SEALING OF SURFACE MICROMACHINED CAVITIES USING CHEMICAL VAPOR DEPOSITED MATERIALS

1994 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1994.24 ◽

1994 ◽

Author(s):

C. Liu ◽

Y.-C. Tai

Keyword(s):

Chemical Vapor ◽

Chemical Vapor Deposited

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A HIGH-DENSITY TACTILE IMAGER FOR READING EMBOSSED CHARACTERS

1994 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1994.3 ◽

1994 ◽

Author(s):

R.J. DeSouza ◽

K.D. Wise

Keyword(s):

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SILICON WAFER BONDING FOR MICROMECHANICAL DEVICES

1994 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1994.30 ◽

1994 ◽

Author(s):

M.A. Schmidt

Keyword(s):

Silicon Wafer ◽

Wafer Bonding ◽

Micromechanical Devices

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HIGH-DENSITY VERTICAL COMB ARRAY MICROACTUATORS FABRICATED USING A NOVEL BULK/POLY-SILICON TRENCH REFILL TECHNOLOGY

1994 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1994.32 ◽

1994 ◽

Author(s):

A. Selvakumar ◽

K. Najafi

Keyword(s):

High Density ◽

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AN ULTRA-SENSITIVE CAPACITIVE PRESSURE SENSOR WITH A BOSSED DIELECTRIC DIAPHRAGM

1994 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1994.47 ◽

1994 ◽

Author(s):

Y. Zhang ◽

K.D. Wise

Keyword(s):

Pressure Sensor ◽

Capacitive Pressure Sensor

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MICROFABRICATION OF TWEEZERS WITH LARGE GRIPPING FORCES AND A LARGE RANGE OF MOTION

1994 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1994.25 ◽

1994 ◽

Author(s):

W.-H. Chu ◽

M. Mehregany

Keyword(s):

Range Of Motion ◽

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