Integration of Fluorescent, NV-Rich Nanodiamond Particles with AFM Cantilevers by Focused Ion Beam for Hybrid Optical and Micromechanical Devices

In this paper, a novel fabrication technology of atomic force microscopy (AFM) probes integrating cantilever tips with an NV-rich diamond particle is presented. Nanomanipulation techniques combined with the focused electron beam-induced deposition (FEBID) procedure were applied to position the NV-rich diamond particle on an AFM cantilever tip. Ultrasonic treatment of nanodiamond suspension was applied to reduce the size of diamond particles for proper geometry and symmetry. The fabricated AFM probes were tested utilizing measurements of the electrical resistance at highly oriented pyrolytic graphite (HOPG) and compared with a standard AFM cantilever performance. The results showed novel perspectives arising from combining the functionalities of a scanning AFM with optically detected magnetic resonance (ODMR). In particular, it offers enhanced magnetometric sensitivity and the nanometric resolution.

Efficient Optomechanical Mode-Shape Mapping of Micromechanical Devices

Visualizing eigenmodes is crucial in understanding the behavior of state-of-the-art micromechanical devices. We demonstrate a method to optically map multiple modes of mechanical structures simultaneously. The fast and robust method, based on a modified phase-lock loop, is demonstrated on a silicon nitride membrane and shown to outperform three alternative approaches. Line traces and two-dimensional maps of different modes are acquired. The high quality data enables us to determine the weights of individual contributions in superpositions of degenerate modes.

Microchemomechanical devices using DNA hybridization

The programmability of DNA oligonucleotides has led to sophisticated DNA nanotechnology and considerable research on DNA nanomachines powered by DNA hybridization. Here, we investigate an extension of this technology to the micrometer-colloidal scale, in which observations and measurements can be made in real time/space using optical microscopy and holographic optical tweezers. We use semirigid DNA origami structures, hinges with mechanical advantage, self-assembled into a nine-hinge, accordion-like chemomechanical device, with one end anchored to a substrate and a colloidal bead attached to the other end. Pulling the bead converts the mechanical energy into chemical energy stored by unzipping the DNA that bridges the hinge. Releasing the bead returns this energy in rapid (>20 μm/s) motion of the bead. Force-extension curves yield energy storage/retrieval in these devices that is very high. We also demonstrate remote activation and sensing—pulling the bead enables binding at a distant site. This work opens the door to easily designed and constructed micromechanical devices that bridge the molecular and colloidal/cellular scales.

Measuring the Casimir Forces with an Adhered Cantilever: Analysis of Roughness and Background Effects

Technological progress has made possible precise measurements of the Casimir forces at distances less than 100 nm. It has enabled stronger constraints on the non-Newtonian forces at short separations and improved control of micromechanical devices. Experimental information on the forces below 30 nm is sparse and not precise due to pull-in instability and surface roughness. Recently, a method of adhered cantilever was proposed to measure the forces at small distances, which does not suffer from the pull-in instability. Deviation of the cantilever from a classic shape carries information on the forces acting nearby the adhered end. We calculate the force between a flat cantilever and rough Au plate and demonstrate that the effect of roughness dominates when the bodies approach the contact. Short-distance repulsion operating at the contact is included in the analysis. Deviations from the classic shape due to residual stress, inhomogeneous thickness of the cantilever, and finite compliance of the substrate are analysed. It is found that a realistic residual stress gives a negligible contribution to the shape, while the finite compliance and inhomogeneous thickness give measurable contributions that have to be subtracted from the raw data.

Analysis of Promising Areas for Creating Materials of Micromechanical Devices

In this work, data on the development of such an important section of Electrical Engineering as “Electrical conductors and methods for their manufacture” are gathered together. The information collected will allow you to compare different materials suitable for the manufacture of electrically conductive structures. The paper also has a history of the development of this section, as well as a patent study of relevant and unusual methods for the manufacture of electrical conductors.

Photoactuation of Micromechanical Devices by Photochromic Molecules

Spiropyran doped P(VDF-TrFE) nanocomposite films were spray-coated onto silicon micro-cantilevers. We show that switching the molecules from the closed- to the open-ring form by UV light gives rise to a...

Balancing of metal resonators of wave solid-state gyroscopes of general use

Wave solid-state gyroscopes (WSG) are among the most modern navigation devices. Based on the phenomenon of precession of elastic waves in thin-walled axisymmetric bodies, WSGs have a simple design, including 2-3 fixed parts, and have a number of advantages over other types of gyroscopes: great resource of work; small random error; resistance to severe operating conditions (overload, vibration, gamma radiation); relatively small overall dimensions, weight and power consumption; preservation of inertial information during short-term power outages. From the point of view of practical application and technologies used, three main groups of WSG can be distinguished. Wave solid-state gyroscopes of high precision. In such devices, high-quality (with a Q-factor of over 1·107) quartz resonators, contactless sensors and actuators, as well as complex electronic control systems are used. The field of application today, for various reasons, is limited to space technology, which requires, along with high precision, a long working life. Micromechanical devices of low accuracy for mass use (laptop computers, toys, industrial equipment, etc.) Integration of micromechanical WSGs with satellite systems makes it possible to create small-sized inexpensive navigation systems for widespread use. This market segment is developing very quickly, but production of such devices requires a very high the level of development of the microelectronic industry. An intermediate group consists of sensors of general use with metal resonators. Although these devices are larger than micromechanical devices, their production technology is much simpler. Metal resonators with a quality factor of (3 ... 5)∙104 can be manufactured using universal metal-cutting equipment; such devices have a simple design, do not require the creation of a high vacuum in their housing, and widespread radioelements can be used in control units. As a result, devices of this group, possessing insignificant power consumption and long working life, have a low cost price. On the other hand, the comparatively large dimensions of the resonator allow their precise tuning, which makes it possible to sharply increase the accuracy of the gyro instruments. From these points of view, a general-purpose WSG with a metal resonator is the most promising device that should replace the rotary-type electromechanical gyroscopes used today, and the production of which can be quickly mastered by the domestic industry. The development of such sensors requires solving a number of scientific and technical problems. Since all the main characteristics of such a device are determined by the properties of the resonator, special attention should be paid to its design and production technology. One of the most difficult and expensive operations in the WSG technology is the balancing of the resonator, carried out to eliminate the mass imbalance that arises during its manufacture due to inevitable deviations from the ideal axisymmetric shape (inhomogeneity of the wall thickness, displacement of the centers of the outer and inner surfaces, etc.). At a nonzero value of the 4th harmonics of the mass imbalance, a splitting of the natural frequency of the resonator occurs, leading to random errors in the WSG. A number of technologies are described in the literature to eliminate this mass defect [3-5]. The resonator balancing according to the first three forms of mass defect is much more difficult. Here, oscillations of the center of mass of the resonator occur during operation of the gyroscope and additional dissipation of the energy of oscillations of the resonator in the nodes of its attachment. This leads to a dependence of the Q-factor of the resonator on the orientation of the standing wave and, consequently, to a systematic error of the device. Thus, the aim of this work is to develop a technique and equipment for balancing metal resonators according to the first three forms of mass defect, suitable for use in the production of general-purpose WSGs.

Modeling and Study of Various Types of Inertial Mass Suspensions in the Sensitive Elements of Micromechanical Devices

In microelectromechanical devices and systems (MEMS), capacitive micromechanical accelerometers (MMA) are used in airbag systems, machine vibration monitoring, navigation, seismology, microgravity measurements, etc. The most important structural elements of the sensing element are suspensions, through which the inertial mass is connected to a fixed frame. To ensure reliable operation and stability of sensor parameters, it is necessary to take into account the results of external factors already at the design stage of the sensor structure, especially its sensitive element, and at subsequent stages of the life cycle. In this work, the characteristic structures of suspension elements, which are made of silicon with different crystallographic orientations, are investigated and the results of modeling their most important parameters are presented. The simulation has been performed using the ANSYS program. The natural frequencies of inertial mass oscillations, residual mechanical stresses in the structural elements of silicon sensitive element with different crystallographic orientations have been calculated upon impact (up to 10 000 g). The natural vibration frequency changes and the dynamics of the change in the residual mechanical stress in the suspension elements with a temperature change in the range from +150 to –150 °C for a short time interval of 10 s, which corresponds to thermal shock, investigated. The results of studies of residual mechanical stresses arising upon impact and natural frequencies of inertial mass oscillations have been made it possible to develop recommendations on the choice of the design of suspension elements made of silicon, providing high sensitivity and stability of MMA parameters. It has been established that the use of folded springs with a rectangular or round cross-sectional shape with a suspension element thickness of 40 μm provides the highest temperature stability of the parameters. The results obtained are useful for developing real designs of MMA and other micromechanical devices