2003 5th International Conference on ASIC. Proceedings (IEEE Cat. No.03TH8690)
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120

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In-house reclaim of test wafers

2003 5th International Conference on ASIC. Proceedings (IEEE Cat. No.03TH8690) ◽

10.1109/issm.2003.1243324 ◽

2004 ◽

Author(s):

R. Moser ◽

J. Priest

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Adsorption of residual trace impurities in UPW onto wafer surface

2003 5th International Conference on ASIC. Proceedings (IEEE Cat. No.03TH8690) ◽

10.1109/issm.2003.1243329 ◽

2004 ◽

Author(s):

M. Kogure ◽

T. Yonehara ◽

T. Sakurai ◽

T. Ohmi

Keyword(s):

Wafer Surface ◽

Trace Impurities

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Removal of particles from wafer stage using wafer-formed cleaning material (cleaning wafer)

2003 5th International Conference on ASIC. Proceedings (IEEE Cat. No.03TH8690) ◽

10.1109/issm.2003.1243309 ◽

2004 ◽

Author(s):

H. Yamauchi ◽

M. Shimajiri ◽

K. Imaoka ◽

H. Takahashi ◽

M. Namikawa ◽

...

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Riding the relational power wave to enhance the command, control & prompt reduction of monitoring wafer usage

2003 5th International Conference on ASIC. Proceedings (IEEE Cat. No.03TH8690) ◽

10.1109/issm.2003.1243326 ◽

2004 ◽

Author(s):

Ang Chee Teck ◽

Ko Chen Pin ◽

K. Teo ◽

F. Huang ◽

J. Wang

Keyword(s):

Relational Power ◽

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Simulation of circuit speed and leakage current in the presence of imperfect lithography

2003 5th International Conference on ASIC. Proceedings (IEEE Cat. No.03TH8690) ◽

10.1109/issm.2003.1243338 ◽

2004 ◽

Author(s):

L. Milor ◽

M. Choi ◽

L. Capodieci

Keyword(s):

Leakage Current

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Monitoring and qualification using comprehensive surface haze information

2003 5th International Conference on ASIC. Proceedings (IEEE Cat. No.03TH8690) ◽

10.1109/issm.2003.1243307 ◽

2004 ◽

Author(s):

F. Holsteyns ◽

J. Roels ◽

K. Kenis ◽

Q. Toan Le ◽

P.W. Mertens

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A decision support system of real time dispatching in semiconductor wafer fabrication with shortest process time in wet bench

2003 5th International Conference on ASIC. Proceedings (IEEE Cat. No.03TH8690) ◽

10.1109/issm.2003.1243287 ◽

2004 ◽

Author(s):

M.D. Hsieh ◽

Amos Lin ◽

Kenley Kuo ◽

H.L. Wang

Keyword(s):

Decision Support ◽

Decision Support System ◽

Real Time ◽

Support System ◽

Wafer Fabrication ◽

Process Time ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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Tactical advanced process control

2003 5th International Conference on ASIC. Proceedings (IEEE Cat. No.03TH8690) ◽

10.1109/issm.2003.1243301 ◽

2004 ◽

Author(s):

M. Dorough ◽

C. Jensen ◽

D. Do ◽

M. Hensen ◽

E. Standley

Keyword(s):

Process Control ◽

Advanced Process Control

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Build-up technology of a new ultrapure water supplying system

2003 5th International Conference on ASIC. Proceedings (IEEE Cat. No.03TH8690) ◽

10.1109/issm.2003.1243330 ◽

2004 ◽

Author(s):

M. Okumura ◽

H. Haeno ◽

I. Yokoi ◽

T. Ohmi

Keyword(s):

Ultrapure Water

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Effective particle removal on post polish cleaning by pH control of HF solution

2003 5th International Conference on ASIC. Proceedings (IEEE Cat. No.03TH8690) ◽

10.1109/issm.2003.1243328 ◽

2004 ◽

Author(s):

A. Ishida ◽

T. Nagashima ◽

D. Takeda ◽

T. Kajita ◽

T. Muneta ◽

...

Keyword(s):

Particle Removal ◽

Effective Particle

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