Effective particle removal on post polish cleaning by pH control of HF solution

Author(s):  
A. Ishida ◽  
T. Nagashima ◽  
D. Takeda ◽  
T. Kajita ◽  
T. Muneta ◽  
...  
Author(s):  
Dedy Ng ◽  
Milind Kulkarni ◽  
Hong Liang

One major concern in post-CMP cleaning is particles contamination on the substrate surface after the CMP process. These particles can be abrasive particles from the slurry, debris from pad material, and particles of film being polished. The cleaning method used in this study is direct contact of the substrate surface and brush sweeping. To enhance the cleaning process, an anionic surfactant is added in the cleaning solution. In order to understand effects of surfactant molecules on post-CMP cleaning, for the first time, we use a tribological approach over a range of surfactant concentration and temperature. In this regard, we observe how the surfactant behavior before and after it reaches the critical micelles concentration (cmc). Experimental results show that increase in surfactant concentration can promote bilayer interaction of micelles on the hydrophilic particles. Based on our study, we propose an interactive explanation of surface molecules with the wafer surface and nanoparticles through friction. This understanding will serve as a guide on how much surfactant should be added in order to achieve effective particle removal.


2006 ◽  
Vol 72 (8) ◽  
pp. 5190-5196 ◽  
Author(s):  
Ekaterina Paramonova ◽  
Erica L. Zerfoss ◽  
Bruce E. Logan

ABSTRACT Point-of-use filters containing granular activated carbon (GAC) are an effective method for removing certain chemicals from water, but their ability to remove bacteria and viruses has been relatively untested. Collision efficiencies (α) were determined using clean-bed filtration theory for two bacteria (Raoutella terrigena 33257 and Escherichia coli 25922), a bacteriophage (MS2), and latex microspheres for four GAC samples. These GAC samples had particle size distributions that were bimodal, but only a single particle diameter can be used in the filtration equation. Therefore, consistent with previous reports, we used a particle diameter based on the smallest diameter of the particles (derived from the projected areas of 10% of the smallest particles). The bacterial collision efficiencies calculated using the filtration model were high (0.8 ≤ α ≤ 4.9), indicating that GAC was an effective capture material. Collision efficiencies greater than unity reflect an underestimation of the collision frequency, likely as a result of particle roughness and wide GAC size distributions. The collision efficiencies for microspheres (0.7 ≤ α ≤ 3.5) were similar to those obtained for bacteria, suggesting that the microspheres were a reasonable surrogate for the bacteria. The bacteriophage collision efficiencies ranged from ≥0.2 to ≤0.4. The predicted levels of removal for 1-cm-thick carbon beds ranged from 0.8 to 3 log for the bacteria and from 0.3 to 1.0 log for the phage. These tests demonstrated that GAC can be an effective material for removal of bacteria and phage and that GAC particle size is a more important factor than relative stickiness for effective particle removal.


2021 ◽  
Vol 314 ◽  
pp. 237-246
Author(s):  
Katherine M. Wortman-Otto ◽  
Abigail N. Linhart ◽  
Allie M. Mikos ◽  
Kiana A. Cahue ◽  
Jason J. Keleher

Due to the emergence of sub-7 nm technologies, next generation CMP slurry formulations have continued to increase in additive (nanoparticle and chemistry) complexity to meet stringent device specifications. Therefore, it is essential to probe the molecular level interactions at the nanoparticle/slurry chemistry/substrate interface and in turn correlate them to key performance metrics such as removal rate, post CMP defects, and planarization efficiency. This work will address key interactions through a series of case studies focusing on the role of supramolecular structure and cleaning method (i.e. contact vs. non-contact) during STI post-CMP cleaning, probing the impact of supramolecular structure and mode of cleaning relevant to Cu post-CMP, and development of a biomimetic matrix with chemical activity to act as a brush in STI post-CMP cleaning processes. Results show in both BEOL and FEOL post-CMP cleaning there is a strong correlation to the delivery and “soft” nature of the chemistry to allow for effective particle removal at low mechanical force and prevent further defect formation. Furthermore, this work shows a clear correlation between supramolecular structure and particle removal efficiency under both contact and non-contact post-CMP processes.


2012 ◽  
Author(s):  
Jinsang Yoon ◽  
Han-Shin Lee ◽  
Hyoyeon Kim ◽  
Heungsuk Oh ◽  
Jaehyuck Choi ◽  
...  

2006 ◽  
Vol 53 (7) ◽  
pp. 177-184 ◽  
Author(s):  
J.K. Kim ◽  
D.F. Lawler

Particle breakthrough can occur by either the breakoff of previously captured particles (or flocs) or the direct passage of some influent particles through the filter. Filtration experiments were performed in a laboratory-scale filter using spherical glass beads with a diameter of 0.55 mm as collectors. A single type of particle suspension (Min-U-Sil 5) and three different destabilisation methods (pH control, alum and polymer destabilisation) were used to destabilise particles. The filtration velocity of 5 m/h was similar to that used in standard media filtration practice. To assess the possibility of particle detachment during normal filtration, a hydraulic shock load (20% increase of flow rate) was applied after 4 h of normal filtration. The magnitude of particle detachment was proportional to the particle size for non-Brownian particles. At the same time, less favourable particles, i.e. particles with larger surface charge, were easily detached during the hydraulic shock load. Therefore, proper particle destabilisation before filtration is crucial for maximum particle removal, as well as minimum particle breakthrough.


1984 ◽  
Vol 75 ◽  
pp. 599-602
Author(s):  
T.V. Johnson ◽  
G.E. Morfill ◽  
E. Grun

A number of lines of evidence suggest that the particles making up the E-ring are small, on the order of a few microns or less in size (Terrile and Tokunaga, 1980, BAAS; Pang et al., 1982 Saturn meeting; Tucson, AZ). This suggests that a variety of electromagnetic and plasma affects may be important in considering the history of such particles. We have shown (Morfill et al., 1982, J. Geophys. Res., in press) that plasma drags forces from the corotating plasma will rapidly evolve E-ring particle orbits to increasing distance from Saturn until a point is reached where radiation drag forces acting to decrease orbital radius balance this outward acceleration. This occurs at approximately Rhea's orbit, although the exact value is subject to many uncertainties. The time scale for plasma drag to move particles from Enceladus' orbit to the outer E-ring is ~104yr. A variety of effects also act to remove particles, primarily sputtering by both high energy charged particles (Cheng et al., 1982, J. Geophys. Res., in press) and corotating plasma (Morfill et al., 1982). The time scale for sputtering away one micron particles is also short, 102 - 10 yrs. Thus the detailed particle density profile in the E-ring is set by a competition between orbit evolution and particle removal. The high density region near Enceladus' orbit may result from the sputtering yeild of corotating ions being less than unity at this radius (e.g. Eviatar et al., 1982, Saturn meeting). In any case, an active source of E-ring material is required if the feature is not very ephemeral - Enceladus itself, with its geologically recent surface, appears still to be the best candidate for the ultimate source of E-ring material.


2007 ◽  
Vol 61 (3) ◽  
pp. 305-309
Author(s):  
Takayuki Ohkura
Keyword(s):  

1998 ◽  
Vol 38 (4-5) ◽  
pp. 273-280 ◽  
Author(s):  
A. G. Werker ◽  
E. R. Hall

Spectra of microbial fatty acid methyl esters were used to assess the influence of pH on the biofilm and suspended biomass populations within bench scale moving bed bioreactors treating bleached kraft mill effluent. The fatty acid spectral data were reduced by logcontrast canonical component analysis. The first canonical component differentiated biofilm from suspended populations and the second two appeared to indicate an influence of pH on microbial ecology. Thus, the biofilm and suspended microbial communities were distinct, as were the populations acclimated at pH 6 and pH 8. Experimental data for total organic carbon removal suggested that the more recalcitrant fraction of the influent was consumed by the slower growing, high SRT biofilm fraction of the biomass. Since the biofilm ecology was sensitive to pH within typical pH operating limits of full-scale systems, tighter pH control might improve treatment reliability in the event of process transients.


1998 ◽  
Vol 38 (4-5) ◽  
pp. 29-35 ◽  
Author(s):  
C. J. Banks ◽  
P. N. Humphreys

The stability and operational performance of single stage digestion with and without liquor recycle and two stage digestion were assessed using a mixture of paper and wood as the digestion substrate. Attempts to maintain stable digestion in both single stage reactors were unsuccessful due to the inherently low natural buffering capacity exhibited; this resulted in a rapid souring of the reactor due to unbuffered volatile fatty acid (VFA) accumulation. The use of lime to control pH was unsatisfactory due to interference with the carbonate/bicarbonate equilibrium resulting in wide oscillations in the control parameter. The two stage system overcame the pH stability problems allowing stable operation for a period of 200 days without any requirement for pH control; this was attributed to the rapid flushing of VFA from the first stage reactor into the second stage, where efficient conversion to methane was established. Reactor performance was judged to be satisfactory with the breakdown of 53% of influent volatile solids. It was concluded that the reactor configuration of the two stage system offers the potential for the treatment of cellulosic wastes with a sub-optimal carbon to nitrogen ratio for conventional digestion.


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