2007 International Symposium on Semiconductor Manufacturing
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9781424411412
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300mm prime gaps that need to be addressed to boost productivity

2007 ◽  
Author(s):  
Les Marshall ◽  
Kristin Rust ◽  
Kilian Schmidt
Keyword(s):  
Prime Gaps

Development of a high efficiency PFC abatement system utilizing plasma and Ca(OH)2/CaO under a decompression atmosphere

2007 ◽  
Author(s):  
K. Suzuki ◽  
Y. Ishihara ◽  
K. Sakoda ◽  
Y. Shirai ◽  
M. Hirayama ◽  
...  
Keyword(s):  
High Efficiency

Yield prediction techniques based on DFM rules and criticality for 65nm technology and beyond

2007 ◽  
Author(s):  
Tsutomu Kojima ◽  
S. Kyou ◽  
H. Murakami ◽  
K. Honda ◽  
T. Nakayama ◽  
...  
Keyword(s):  
Yield Prediction ◽  
Prediction Techniques

Using electrostatic repulsion to prevent adhesion of infinitesimal particles

2007 ◽  
Author(s):  
Junji Oikawa ◽  
Terumi Yamashita ◽  
Hidefumi Matsui ◽  
Akitake Tamura ◽  
Teruyuki Hayashi
Keyword(s):  
Electrostatic Repulsion

Cross area lot arrangement — shortest inter cycle time

2007 ◽  
Author(s):  
Yih-Yi Lee ◽  
Chun-Chiej Hsiao
Keyword(s):  
Cycle Time

Ambient gas control in slot-to-slot space inside FOUP to suppress Cu-loss after dual damascene patterning

2007 ◽  
Author(s):  
Takao Kamoshima ◽  
Yasuhisa Fujii ◽  
Toshimitsu Noguchi ◽  
Tomonori Saeki ◽  
Yoshifumi Takata ◽  
...  
Keyword(s):  
Dual Damascene ◽  
Ambient Gas ◽  
Gas Control

Implementation of double patterning lithography process using limited illumination systems

2007 ◽  
Author(s):  
CI Choi ◽  
Miller Qiu ◽  
Winter Li ◽  
Hans Sui ◽  
Fumitake Mieno
Keyword(s):  
Lithography Process ◽  
Double Patterning

Start up optimization for point of use filter in lithography process

2007 ◽  
Author(s):  
Toru Umeda ◽  
Shuichi Tsuzuki ◽  
Toru Numaguchi ◽  
Norio Sato ◽  
Chikara Yamamoto ◽  
...  
Keyword(s):  
Lithography Process ◽  
Point Of Use ◽  
Start Up

Forward echelon-based inventory monitoring in semiconductor supply chain

2007 ◽  
Author(s):  
Ruey-Shan Guo ◽  
David Chiang ◽  
Hong-Wen Lin ◽  
Mei-Shang Guo
Keyword(s):  
Supply Chain
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