Interlayer Dielectrics for Semiconductor Technologies
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Published By Elsevier

9780125112215
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Low-κ polymers

2003 ◽  
pp. 157-199 ◽  
Author(s):  
S.P. Murarka

High-k dielectrics grown by atomic layer deposition

2003 ◽  
pp. 327-348 ◽  
Author(s):  
M.D. Groner ◽  
S.M. George
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
High K

Dielectric materials in optical waveguide aplications

2003 ◽  
pp. 349-389 ◽  
Author(s):  
P.D. Persans ◽  
F. Huang ◽  
N. Agarwal ◽  
S. Ponoth ◽  
J.L. Plawsky
Keyword(s):  
Optical Waveguide ◽  
Dielectric Materials

Chemical vapor deposition of C-F low-k materials

2003 ◽  
pp. 201-225
Author(s):  
M. Uhlig ◽  
T. Gessner
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low K

Silicon-based dielectrics

2003 ◽  
pp. 121-156 ◽  
Author(s):  
C. Leung ◽  
E. Ong
Keyword(s):  
Silicon Based

Compatibilities of dielectric films

2003 ◽  
pp. 77-119 ◽  
Author(s):  
C.K. Goldberg ◽  
V.S. Wang
Keyword(s):  
Dielectric Films

Future trends in silicon technologies

2003 ◽  
pp. 409-427 ◽  
Author(s):  
E. Ong ◽  
A. Sinha
Keyword(s):  
Future Trends

Nanoporous dielectric films

2003 ◽  
pp. 261-325 ◽  
Author(s):  
J.L. Plawsky ◽  
W.N. Gill ◽  
A. Jain ◽  
S. Rogojevic
Keyword(s):  
Dielectric Films

Spin-on Si-based low-k materials

2003 ◽  
pp. 227-259
Author(s):  
S.E. Schulz ◽  
T. Gessner
Keyword(s):  
Low K
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