Interlayer Dielectrics for Semiconductor Technologies
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Published By Elsevier

9780125112215
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Dielectric materials in optical waveguide aplications

2003 ◽  
pp. 349-389 ◽  
Author(s):  
P.D. Persans ◽  
F. Huang ◽  
N. Agarwal ◽  
S. Ponoth ◽  
J.L. Plawsky
Keyword(s):  
Optical Waveguide ◽  
Dielectric Materials

Silicon-based dielectrics

2003 ◽  
pp. 121-156 ◽  
Author(s):  
C. Leung ◽  
E. Ong
Keyword(s):  
Silicon Based

Nanoporous dielectric films

2003 ◽  
pp. 261-325 ◽  
Author(s):  
J.L. Plawsky ◽  
W.N. Gill ◽  
A. Jain ◽  
S. Rogojevic
Keyword(s):  
Dielectric Films

Spin-on Si-based low-k materials

2003 ◽  
pp. 227-259
Author(s):  
S.E. Schulz ◽  
T. Gessner
Keyword(s):  
Low K
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