Interlayer Dielectrics for Semiconductor Technologies
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Published By Elsevier

9780125112215

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Low-κ polymers

Interlayer Dielectrics for Semiconductor Technologies ◽

10.1016/b978-012511221-5/50008-8 ◽

2003 ◽

pp. 157-199 ◽

Author(s):

S.P. Murarka

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List of Contributors

Interlayer Dielectrics for Semiconductor Technologies ◽

10.1016/b978-012511221-5/50002-7 ◽

2003 ◽

pp. xi-xii

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High-k dielectrics grown by atomic layer deposition

Interlayer Dielectrics for Semiconductor Technologies ◽

10.1016/b978-012511221-5/50012-x ◽

2003 ◽

pp. 327-348 ◽

Author(s):

M.D. Groner ◽

S.M. George

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Layer Deposition ◽

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Dielectric materials in optical waveguide aplications

Interlayer Dielectrics for Semiconductor Technologies ◽

10.1016/b978-012511221-5/50013-1 ◽

2003 ◽

pp. 349-389 ◽

Author(s):

P.D. Persans ◽

F. Huang ◽

N. Agarwal ◽

S. Ponoth ◽

J.L. Plawsky

Keyword(s):

Optical Waveguide ◽

Dielectric Materials

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Chemical vapor deposition of C-F low-k materials

Interlayer Dielectrics for Semiconductor Technologies ◽

10.1016/b978-012511221-5/50009-x ◽

2003 ◽

pp. 201-225

Author(s):

M. Uhlig ◽

T. Gessner

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

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Compatibilities of dielectric films

Interlayer Dielectrics for Semiconductor Technologies ◽

10.1016/b978-012511221-5/50006-4 ◽

2003 ◽

pp. 77-119 ◽

Author(s):

C.K. Goldberg ◽

V.S. Wang

Keyword(s):

Dielectric Films

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Silicon-based dielectrics

Interlayer Dielectrics for Semiconductor Technologies ◽

10.1016/b978-012511221-5/50007-6 ◽

2003 ◽

pp. 121-156 ◽

Author(s):

C. Leung ◽

E. Ong

Keyword(s):

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Future trends in silicon technologies

Interlayer Dielectrics for Semiconductor Technologies ◽

10.1016/b978-012511221-5/50015-5 ◽

2003 ◽

pp. 409-427 ◽

Author(s):

E. Ong ◽

A. Sinha

Keyword(s):

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Nanoporous dielectric films

Interlayer Dielectrics for Semiconductor Technologies ◽

10.1016/b978-012511221-5/50011-8 ◽

2003 ◽

pp. 261-325 ◽

Author(s):

J.L. Plawsky ◽

W.N. Gill ◽

A. Jain ◽

S. Rogojevic

Keyword(s):

Dielectric Films

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Spin-on Si-based low-k materials

Interlayer Dielectrics for Semiconductor Technologies ◽

10.1016/b978-012511221-5/50010-6 ◽

2003 ◽

pp. 227-259

Author(s):

S.E. Schulz ◽

T. Gessner

Keyword(s):

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