Chemical vapor deposition of C-F low-k materials
2003 ◽
pp. 201-225
2020 ◽
Vol 20
(4)
◽
pp. 2301-2307
Keyword(s):
2012 ◽
Vol 51
◽
pp. 05EC01
◽
Keyword(s):
Keyword(s):
2010 ◽
Vol 28
(1)
◽
pp. 173-179
◽
Keyword(s):
2011 ◽
Vol 50
(8)
◽
pp. 08KA01
◽
Keyword(s):
2014 ◽