Silicon Processing
Latest Publications

TOTAL DOCUMENTS

37
(FIVE YEARS 0)

H-INDEX

3
(FIVE YEARS 0)

Published By ASTM International

9780803102439
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Process Technology Requirements for VLSIC Fabrication

2009 ◽  
pp. 229-229-9
Author(s):  
R Kumar ◽  
MM Nowak ◽  
EH Tyler ◽  
MA Vinson
Keyword(s):  
Process Technology

Temperature-Dependent Infrared Characterization of Silicon Wafers

2009 ◽  
pp. 445-445-14
Author(s):  
DG Mead ◽  
RM Gummer ◽  
CR Anderson
Keyword(s):  
Silicon Wafers ◽  
Temperature Dependent

Defects and Carrier Lifetime in Silicon

2009 ◽  
pp. 389-389-16 ◽  
Author(s):  
A Rohatgi ◽  
P Rai-Choudhury
Keyword(s):  
Carrier Lifetime
Load More ...
Sign in / Sign up

Export Citation Format

Share Document