Optical Science and Engineering - Optical Inspection of Microsystems
Latest Publications

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Published By CRC Press

9780849336829, 9781420019162

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Spectroscopic Techniques for MEMS Inspection

Optical Science and Engineering - Optical Inspection of Microsystems ◽

10.1201/9781420019162.ch14 ◽

2006 ◽

pp. 459-481 ◽

Cited By ~ 2

Author(s):

Ingrid De Wolf

Keyword(s):

Spectroscopic Techniques

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Image Correlation Techniques for Microsystems Inspection

Optical Science and Engineering - Optical Inspection of Microsystems ◽

10.1201/9781420019162.ch2 ◽

2006 ◽

pp. 55-102

Author(s):

Dietmar Vogel ◽

Bernd Michel

Keyword(s):

Image Correlation ◽

Correlation Techniques

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Contributors

Optical Science and Engineering - Optical Inspection of Microsystems ◽

10.1201/9781420019162.fmatt ◽

2006 ◽

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Light Scattering Techniques for the Inspection of Microcomponents and Microstructures

Optical Science and Engineering - Optical Inspection of Microsystems ◽

10.1201/9781420019162.ch3 ◽

2006 ◽

pp. 103-119

Author(s):

Angela Duparr√©

Keyword(s):

Light Scattering

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Speckle Metrology for Microsystem Inspection

Optical Science and Engineering - Optical Inspection of Microsystems ◽

10.1201/9781420019162.ch13 ◽

2006 ◽

pp. 427-458

Author(s):

Petra Aswendt ◽

Roland H√∂fling

Keyword(s):

Speckle Metrology

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Interference Microscopy Techniques for Microsystem Characterization

Optical Science and Engineering - Optical Inspection of Microsystems ◽

10.1201/9781420019162.ch8 ◽

2006 ◽

pp. 217-244 ◽

Cited By ~ 1

Author(s):

Alain Bosseboeuf ◽

Sylvain Petitgrand

Keyword(s):

Interference Microscopy ◽

Microscopy Techniques

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Image Processing and Computer Vision for MEMS Testing

Optical Science and Engineering - Optical Inspection of Microsystems ◽

10.1201/9781420019162.ch1 ◽

2006 ◽

pp. 1-54

Author(s):

Markus H√ºttel

Keyword(s):

Image Processing ◽

Computer Vision ◽

Mems Testing

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Digital Holography and Its Application in MEMS/MOEMS Inspection

Optical Science and Engineering - Optical Inspection of Microsystems ◽

10.1201/9781420019162.ch12 ◽

2006 ◽

pp. 351-425 ◽

Cited By ~ 3

Author(s):

Pietro Ferraro ◽

Wolfgang Osten

Keyword(s):

Digital Holography

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Measuring MEMS in Motion by Laser Doppler Vibrometry

Optical Science and Engineering - Optical Inspection of Microsystems ◽

10.1201/9781420019162.ch9 ◽

2006 ◽

pp. 245-292 ◽

Cited By ~ 5

Author(s):

Heinrich Steger ◽

Michael W√∂rtge ◽

Georg Siegmund ◽

Christian Rembe

Keyword(s):

Laser Doppler ◽

Laser Doppler Vibrometry

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Grating Interferometry for In-Plane Displacement and Strain Measurement of Microcomponents

Optical Science and Engineering - Optical Inspection of Microsystems ◽

10.1201/9781420019162.ch7 ◽

2006 ◽

pp. 201-215 ◽

Cited By ~ 1

Author(s):

Leszek Salbut

Keyword(s):

Strain Measurement ◽

Plane Displacement

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Optical Science and Engineering - Optical Inspection of MicrosystemsLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By CRC Press

Spectroscopic Techniques for MEMS Inspection

Image Correlation Techniques for Microsystems Inspection

Contributors

Light Scattering Techniques for the Inspection of Microcomponents and Microstructures

Speckle Metrology for Microsystem Inspection

Interference Microscopy Techniques for Microsystem Characterization

Image Processing and Computer Vision for MEMS Testing

Digital Holography and Its Application in MEMS/MOEMS Inspection

Measuring MEMS in Motion by Laser Doppler Vibrometry

Grating Interferometry for In-Plane Displacement and Strain Measurement of Microcomponents

Optical Science and Engineering - Optical Inspection of Microsystems
Latest Publications