Optical Science and Engineering - Optical Inspection of Microsystems
Latest Publications

TOTAL DOCUMENTS

15

(FIVE YEARS 0)

H-INDEX

2

(FIVE YEARS 0)

Published By CRC Press

9780849336829, 9781420019162

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Spectroscopic Techniques for MEMS Inspection

Optical Science and Engineering - Optical Inspection of Microsystems ◽

10.1201/9781420019162.ch14 ◽

2006 ◽

pp. 459-481 ◽

Author(s):

Ingrid De Wolf

Keyword(s):

Spectroscopic Techniques

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Image Correlation Techniques for Microsystems Inspection

Optical Science and Engineering - Optical Inspection of Microsystems ◽

10.1201/9781420019162.ch2 ◽

2006 ◽

pp. 55-102

Author(s):

Dietmar Vogel ◽

Bernd Michel

Keyword(s):

Image Correlation ◽

Correlation Techniques

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Speckle Metrology for Microsystem Inspection

Optical Science and Engineering - Optical Inspection of Microsystems ◽

10.1201/9781420019162.ch13 ◽

2006 ◽

pp. 427-458

Author(s):

Petra Aswendt ◽

Roland H√∂fling

Keyword(s):

Speckle Metrology

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Interference Microscopy Techniques for Microsystem Characterization

Optical Science and Engineering - Optical Inspection of Microsystems ◽

10.1201/9781420019162.ch8 ◽

2006 ◽

pp. 217-244 ◽

Author(s):

Alain Bosseboeuf ◽

Sylvain Petitgrand

Keyword(s):

Interference Microscopy ◽

Microscopy Techniques

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Image Processing and Computer Vision for MEMS Testing

Optical Science and Engineering - Optical Inspection of Microsystems ◽

10.1201/9781420019162.ch1 ◽

2006 ◽

pp. 1-54

Author(s):

Markus H√ºttel

Keyword(s):

Image Processing ◽

Computer Vision ◽

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Light Scattering Techniques for the Inspection of Microcomponents and Microstructures

Optical Science and Engineering - Optical Inspection of Microsystems ◽

10.1201/9781420019162.ch3 ◽

2006 ◽

pp. 103-119

Author(s):

Angela Duparr√©

Keyword(s):

Light Scattering

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Contributors

Optical Science and Engineering - Optical Inspection of Microsystems ◽

10.1201/9781420019162.fmatt ◽

2006 ◽

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Digital Holography and Its Application in MEMS/MOEMS Inspection

Optical Science and Engineering - Optical Inspection of Microsystems ◽

10.1201/9781420019162.ch12 ◽

2006 ◽

pp. 351-425 ◽

Author(s):

Pietro Ferraro ◽

Wolfgang Osten

Keyword(s):

Digital Holography

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Measuring MEMS in Motion by Laser Doppler Vibrometry

Optical Science and Engineering - Optical Inspection of Microsystems ◽

10.1201/9781420019162.ch9 ◽

2006 ◽

pp. 245-292 ◽

Author(s):

Heinrich Steger ◽

Michael W√∂rtge ◽

Georg Siegmund ◽

Christian Rembe

Keyword(s):

Laser Doppler ◽

Laser Doppler Vibrometry

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Grating Interferometry for In-Plane Displacement and Strain Measurement of Microcomponents

Optical Science and Engineering - Optical Inspection of Microsystems ◽

10.1201/9781420019162.ch7 ◽

2006 ◽

pp. 201-215 ◽

Author(s):

Leszek Salbut

Keyword(s):

Strain Measurement ◽

Plane Displacement

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