Transmission Electron Microscopy in Micro-Nanoelectronics
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Published By John Wiley & Sons, Inc.

9781118579022, 9781848213678

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Specimen Preparation for Semiconductor Analysis

Transmission Electron Microscopy in Micro-Nanoelectronics ◽

10.1002/9781118579022.ch9 ◽

2013 ◽

pp. 219-236

Author(s):

David Cooper ◽

Gérard Ben Assayag

Keyword(s):

Specimen Preparation

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Dopant Distribution Quantitative Analysis Using STEM-EELS/EDX Spectroscopy Techniques

Transmission Electron Microscopy in Micro-Nanoelectronics ◽

10.1002/9781118579022.ch2 ◽

2013 ◽

pp. 37-64

Author(s):

Roland Pantel ◽

Germain Servanton

Keyword(s):

Quantitative Analysis ◽

Dopant Distribution

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Index

Transmission Electron Microscopy in Micro-Nanoelectronics ◽

10.1002/9781118579022.index ◽

2013 ◽

pp. 241-243

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Characterization of Process-Induced Defects

Transmission Electron Microscopy in Micro-Nanoelectronics ◽

10.1002/9781118579022.ch7 ◽

2013 ◽

pp. 165-198 ◽

Author(s):

Nikolay Cherkashin ◽

Alain Claverie

Keyword(s):

Induced Defects

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Quantitative Strain Measurement in Advanced Devices: A Comparison Between Convergent Beam Electron Diffraction and Nanobeam Diffraction

Transmission Electron Microscopy in Micro-Nanoelectronics ◽

10.1002/9781118579022.ch3 ◽

2013 ◽

pp. 65-80

Author(s):

Laurent Clément ◽

Dominique Delille

Keyword(s):

Electron Diffraction ◽

Strain Measurement ◽

Convergent Beam Electron Diffraction ◽

Beam Electron ◽

Convergent Beam

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Active Dopant Profiling in the TEM by Off-Axis Electron Holography

Transmission Electron Microscopy in Micro-Nanoelectronics ◽

10.1002/9781118579022.ch1 ◽

2013 ◽

pp. 1-36 ◽

Author(s):

David Cooper

Keyword(s):

Electron Holography ◽

Dopant Profiling

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List of Authors

Transmission Electron Microscopy in Micro-Nanoelectronics ◽

10.1002/9781118579022.oth1 ◽

2013 ◽

pp. 237-240

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Front Matter

Transmission Electron Microscopy in Micro-Nanoelectronics ◽

10.1002/9781118579022.fmatter ◽

2013 ◽

pp. i-xiv

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Magnetic Mapping Using Electron Holography

Transmission Electron Microscopy in Micro-Nanoelectronics ◽

10.1002/9781118579022.ch5 ◽

2013 ◽

pp. 107-134 ◽

Author(s):

Etienne Snoeck ◽

Christophe Gatel

Keyword(s):

Electron Holography

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In SituCharacterization Methods in Transmission Electron Microscopy

Transmission Electron Microscopy in Micro-Nanoelectronics ◽

10.1002/9781118579022.ch8 ◽

2013 ◽

pp. 199-218

Author(s):

Aurélien Masseboeuf

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Transmission Electron

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