Mechanical and Electrical Properties of Al2O3 Thin Films on Metals, Ceramics and Resins Prepared by Aerosol Deposition Method

2008 ◽  
pp. 121-125 ◽  
Author(s):  
Kazuya Tsujimichi ◽  
Katsuhiko Mori ◽  
Atsushi Yoshida ◽  
Junichi Iwasawa ◽  
Hironori Hatono ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Aerosol Deposition ◽  
Deposition Method ◽  
Mechanical And Electrical Properties ◽  
Aerosol Deposition Method

Aerosol Deposition Method for Fabrication of Nano Crystal Ceramic Layer

2004 ◽  
Vol 449-452 ◽  
pp. 43-48 ◽  
Author(s):  
Jun Akedo
Keyword(s):  
Gas Flow ◽  
Room Temperature ◽  
Aerosol Deposition ◽  
Deposition Method ◽  
Polycrystalline Structure ◽  
Mechanical And Electrical Properties ◽  
Aerosol Deposition Method ◽  
Shock Consolidation ◽  
Nano Crystal ◽  
Fine Ceramics

Aerosol deposition method (ADM) for shock-consolidation of fine ceramics powder to form dense and hard layers is reported. Submicron ceramic particles were accelerated by gas flow in the nozzle up to velocity of several hundred m/s. During interaction with substrate, these particles formed thick (10 ~ 100 µm), dense, uniform and hard ceramics layers. Depositions were fulfilled at room temperature. Every layer has polycrystalline structure with nano-meter order scale.􀀂 The results of fabrications, microstructure, mechanical and electrical properties of oxides (α-Al2O3; Pb(Zr0.52,Ti0.48)O3 etc.) and non-oxides materials are presented.

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